Two-degree-of-freedom linear motion platform with piezoelectric drive
A technology of piezoelectric drive and linear motion, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve problems such as low motion accuracy, complex structure, and heavy weight , to achieve the effect of high electromechanical coupling efficiency, high utilization rate, large amplitude and vibration speed
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specific Embodiment approach 1
[0038] Specific implementation mode one: see figure 1 , 2 , 3, 4 and 6 illustrate this embodiment, the two-degree-of-freedom linear motion platform driven by piezoelectricity described in this embodiment includes a piezoelectric vibrator 1, a static platform 2, a moving platform 3, four guide rails 4 and eight a slider 5; the piezoelectric vibrator 1 is located between the static platform 2 and the moving platform 3,
[0039] The piezoelectric vibrator 1 includes an intermediate beam 1-1, eight piezoelectric ceramic sheets 1-2 and two rear end covers 1-3, and the intermediate beam 1-1 includes two horns 1-1-1 and a driving foot 1-1-2, the two sides of the driving foot 1-1-2 are respectively fixedly connected with the end faces of the two horns 1-1-1;
[0040] A stud 1-3-1 is provided at the center of one side of the rear end cover 1-3, and each of the studs 1-3-1 is set with four piezoelectric ceramic sheets 1-2, and the rear end cover 1-3 is screwed to the head end of the h...
specific Embodiment approach 2
[0047] Specific implementation mode two: see Figure 5 Describe this embodiment. The difference between this embodiment and the two-degree-of-freedom linear motion platform driven by piezoelectricity described in Embodiment 1 is that the eight piezoelectric ceramic sheets 1-2 in the piezoelectric vibrator 1 are all along the thickness direction Polarization, in the direction from one rear end cover 1-3 to the other rear end cover 1-3, the eight piezoelectric ceramic sheets 1-2 are respectively the first to the eighth piezoelectric ceramic sheet 2,
[0048] The first and second piezoelectric ceramic sheets 1-2 are equally divided into upper and lower halves for polarization. In the first and second piezoelectric ceramic sheets 1-2, the same piezoelectric ceramic sheet 1- 2 The polarization directions of the upper and lower half regions are opposite, and the polarization directions of the two lower half regions of the first and second piezoelectric ceramic sheets 1-2 are opposit...
specific Embodiment approach 3
[0054] Embodiment 3: The difference between this embodiment and the two-degree-of-freedom linear motion platform driven by piezoelectricity described in Embodiment 2 is that all the ground electrode sheets 1-4 in the piezoelectric vibrator 1 share the same All the bending vibration electrode sheets 1-5 are connected to the first phase driving signal, all the longitudinal bending multiplexing electrode sheets 1-6 are connected to the second phase driving signal, and the first phase driving signal and the second phase driving signal are connected at the same time have a phase difference of 90 degrees or -90 degrees.
[0055] In this embodiment, the first-phase driving signal and the second-phase driving signal have a phase difference of 90 degrees in time. Under various driving modes, the vibrator will realize the moving platform 3 through the combination of longitudinal vibration and vertical bending vibration. Linear actuation along the axis of the vibrator, see Figure 7 and...
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