Calibration method and calibration apparatus for positioning error of position sensitive detector

Abstract

The invention provides a calibration method and calibration apparatus for a positioning error of a position sensitive detector (PSD). The calibration apparatus is composed of an electrically controlled translation bench, a single-shaft precision rotary table, a semiconductor laser for transmitting a light beam to the PSD, and a laser clamping device for clamping the semiconductor laser. The single-shaft precision rotary table is fixed on the electrically controlled translation bench and the PSD is arranged on the electrically controlled translation bench. According to the method, the normal of the photosensitive surface of the PSD can be adjusted to be perpendicular to the moving direction of the electrically controlled translation bench easily, thereby avoiding a testing error caused by coordinate system rotation and improving the testing precision of the PSD positioning error.

Description

technical field [0001] The invention belongs to the technical field of optical positioning and tracking testing, and in particular relates to a calibration method and a calibration device for a position positioning error of a high-precision position sensitive detector. Background technique [0002] Position Sensitive Detector (PSD for short) is a photoelectric position sensor based on the inhomogeneous semiconductor lateral photoelectric effect, which can accurately and quickly detect the energy center position of the incident light spot, with high position resolution and good response characteristics , suitable for real-time dynamic detection of position, displacement, etc. The currently developed PSD can be divided into two types: one-dimensional PSD and two-dimensional PSD, which can be used to measure the moving position and displacement of the light point on a straight line and a plane, respectively. Two-dimensional PSD is used in laser alignment, optical positioning an...

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Problems solved by technology

[0004] This method is based on the premise that the PSD photosensitive surface is parallel to the two-dimensional measurement plane of the universal tool microscope. Therefore, the parallelism between the PSD photosensitive surface and the two-dimensional measurement plane of the universal tool microscope is a key factor affecting the accuracy of the PSD positioning error test. This method does not The fine-tuning link for adjusting the parallelism of the PSD photosensitive surface and the two-dimensional measurement plane of the universal tool microscope

If the PSD photosensitive surface is not parallel to the two-dimensional measurement plane of the universal tool microscope, the PSD measurement coordinate system and the universal tool microscope measurement coordinate system are not the same coordinate system, and a relative rotation will occur between the two measurement coordinate systems, and the rotation angle It cannot be known under the above test conditions, so the test error introduced by coordinate rotation cannot be corrected

That is, under the condition that the two measurement coordinate systems are relatively rotated, the measurement coordinates of the obtained PSD and the measurement coordinates of the universal tool microscope cannot be directly calculated

[0005] Since there is a phenomenon of coordinate rotation between the PSD measurement coordinate system of the above method and the standard equipment measurement coordinate system, it is of practical significance to propose a calibration method and calibration device for the positioning error of a high-precision position-sensitive detector.

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