A single-electrode regulated ion triode with a divergent/converging nano-flow channel structure and its characteristic adjustment method
A single-electrode, triode technology, applied in fluid controllers, chemical instruments and methods, laboratory utensils, etc., can solve difficult manufacturing processes, increase masks, remove problems, etc., to achieve low cost, convenient manufacturing, good application Foreground effect
A single-electrode, triode technology, applied in fluid controllers, chemical instruments and methods, laboratory utensils, etc., can solve difficult manufacturing processes, increase masks, remove problems, etc., to achieve low cost, convenient manufacturing, good application Foreground effect
CN105435871BActive Publication Date: 2017-05-31SOUTH CHINA UNIV OF TECH
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[0025] The present invention will be described in further detail below.
[0026] A single-electrode regulating ion triode with a converging nano flow channel structure comprises: a substrate, an upper cover plate, a regulating electrode, a driving electrode, an insulating layer, and a liquid storage pool.
[0027] The substrate is PDMS or PMMA, in the shape of a thin cube, and a converging nano flow channel is processed on the upper end surface. Figure 3A and 3B is the top view of the nanochannel, the nanochannel has a divergent type ( Figure 3A ) and aggregate structure ( Figure 3B ), the difference between the divergent and convergent structure is that the divergent flow channel has a small middle part and large openings at the front and rear ends; the convergent structure has a large middle part and small openings at the front and rear ends. Both the divergence angle and the convergence angle are represented by α, and when the external given conditions are the same, t...
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The invention relates to a single electrode regulated ion triode with a diverging / convergent nano channel structure. The single electrode regulated ion triode comprises a substrate, an upper cover plate, regulating electrodes, driving electrodes, an insulating layer, and liquid storage pools; one driving electrode, the insulating layer, one liquid storage pool, the substrate, the other liquid storage pool, the insulating layer, and the other driving electrode are arranged from the front to the back successively; one regulating electrode, the insulating layer, the substrate, the insulating layer, and the other regulating electrode are arranged from the left to the right successively; the upper end surface of the substrate is provided with a diverging / convergent nano channel with a width of nanometer scale, and the single electrode regulated ion triode is penetrated by the diverging / convergent nano channel from the front to the back; and the upper cover plate used for covering the diverging / convergent nano channel is arranged on the substrate. The invention also relates to a characteristic adjusting method of the single electrode regulated ion triode with a diverging / convergent nano channel structure. The single electrode regulated ion triode is simpler in structure, is lower in cost, and is more convenient to prepare; real-time regulating of triode breakover current can be realized; and application prospect is promising. The invention belongs to the technical field of ion triode.
Description
technical field [0001] The invention relates to an ion triode, in particular to an ion triode with a diverging / converging nano flow channel structure and a method for adjusting its characteristics. Background technique [0002] Mass transport at the microscale, especially fluid flow properties in microchannels and porous matrices, and enhanced heat and mass transport have received extensive attention. In recent years, with the development of MEMS (Micro-Electro-Mechanical Systems) technology, the preparation and application of nanostructures have received extensive attention. For example, Lu et al. used nanoimprint technology to prepare ultrafine (~4nm) Nb (niobium) wires for superconductivity testing; H.Yu et al. and David.C et al. conducted research on nanosensors applied to the study of biological macromolecules. The prepared nanosensor has the characteristics of small size, high compatibility with modern CMOS devices, and strong concentration sensitivity. Among them, n...
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Patent Timeline
31 May 2017
Publication
CN105435871B
- IPC
- B01L3/00
- CPC
- B01L3/502761; B01L3/502784; B01L2200/0636; B01L2300/0829; B01L2400/0415
- Inventors
- 张仕伟; 汤勇