Capacitive humidity sensor and manufacturing method thereof

Abstract

The present invention specifically discloses a capacitive humidity sensor and a manufacturing method thereof, the capacitive humidity sensor comprises at least a first sensing member, a second sensing member, a third sensing member and a substrate, the sensing members are separately fixedly arranged on the surface of the substrate, the first sensing member comprises a heating electrode layer, an insulating layer, a first electrode layer, a second electrode layer and a moisture sensitive layer; the heating electrode layer of the first sensing member is arranged on the surface of the substrate in an overlaying manner, the insulating layer is arranged on the outer surface of the heating electrode layer in the overlaying manner, and extends to the surface of the substrate, the first electrode layer, the moisture sensitive layer and the second electrode layer are successively arranged on the outer surface of the insulating layer in the overlaying manner in the direction from the substrate to the insulating layer, the surface of the second electrode layer is provided with a through hole communicating the moisture sensitive layer; compared with the first sensing member, the second sensing member and the third sensing member do not include a heating electrode layer, and the surface of a second electrode layer of the third sensing member is not provided with a through hole. The capacitive humidity sensor is simple in structure, various layers are solidly contacted, poor contact or falling-off is less prone to occur, the electrode parasitic resistance can be reduced, and the sensor low temperature performance can be enhanced.

Description

technical field [0001] The invention relates to the technical field of humidity sensing, in particular to a capacitive humidity sensor and a manufacturing method thereof. Background technique [0002] The humidity sensor is a device that can accurately detect changes in humidity by determining the change in electrical properties of humidity-sensitive materials due to moisture. It can be widely used in automobiles, medical equipment, air purification systems, automatic cooling / heating systems, home appliances, mobile Equipment, etc., to maintain the humidity of various equipment / systems in an optimal state. Humidity sensors currently on the market can be divided into resistive humidity sensors and capacitive humidity sensors. Among them, resistive humidity sensors measure humidity based on changes in resistance caused by changes in humidity. This type of humidity sensor is widely used, mainly because resistive humidity sensors Compared with the capacitive humidity sensor, it...

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Problems solved by technology

[0007] Aiming at the shortcomings of the above-mentioned tiled interdigitated capacitive humidity sensor with small capacitance and low sensitivity; the sandwich type has the disadvantages of parasitic resistance caused by very thin electrodes and the need for temperature compensation, etc., a capacitive humidity sensor sensor and its manufacturing method are provided.

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