Analysis device and method of electronic-grade chlorine gas
An analysis device and analysis method technology, applied in the direction of measuring devices, analysis materials, material separation, etc., can solve the problems of electronic component product quality decline, more and more stringent requirements, etc., achieve high accuracy, consume less samples, and analyze short time effect
Inactive Publication Date: 2016-04-20
SHANGHAI ZHENGFAN TECH +1
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Problems solved by technology
[0002] High-purity chlorine gas is an indispensable basic material in the preparation of optical fiber communication, microelectronics, and high-temperature superconducting materials. With the rapid development of optical fiber communication and electronic industries, the amount of high-purity chlorine is increasing. The impact on the content of impurities in chlorine gas The requirements are becoming more and more stringent. The purity of chlorine gas currently used in the electronics industry is around 5N (99.999%). Even a very small amount of impurity gas entering the process may lead to a decline in the quality of the final electronic components.
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[0025] Such as figure 1 with figure 2 As shown, the electronic-grade chlorine analysis device of this embodiment includes a pressure regulating valve 1, a helium purifier 2, a first pre-separation column 3, a first analysis column 4, a second pre-separation column 5, and a second analysis column 6. The tenth-way valve 7, the twentieth-way valve 8, the first quantitative loop 9, the second quantitative loop 10, the flow meter 11 and the pulse discharge ionization detector 12. In the initial state, the tenth-way Port No. 1 of valve 5 is connected to port No. 2, port No. 3 is connected to port No. 4, port No. 5 is connected to port No. 6, port No. 7 is connected to port No. 8, port No. 9 is connected to port No. 10, and port No. Port No. 1 of ten-way valve 6 is connected to port No. 2, port No. 3 is connected to port No. 4, port No. 5 is connected to port No. 6, port No. 7 is connected to port No. 8, port No. 9 is connected to port No. 10, In the detection state, port No. 1 of...
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The invention provides an analysis device and method of electronic-grade chlorine gas. The analysis device of electronic-grade chlorine gas is characterized by comprising a first pre-separation column, a first analysis column, a second pre-separation column, a second analysis column, a first ten-way valve, a second ten-way valve, a first quantitative loop, a second quantitative loop and a pulse discharging ionization detector. According to the analysis device of electronic-grade chlorine gas, a chromatographic column separation system is used for separating trace impurities from chlorine gas; and the pulse discharging ionization detector is used for detecting the trace impurities and the detection limit can be as low as 10ppb. Furthermore, the method has the advantages that the accuracy of analyzing the trace impurities in electronic-grade chlorine gas is high, the analysis time is short, a few of samples are consumed and the sensitivity is high.
Description
technical field [0001] The invention relates to a method for measuring the concentration of trace impurities in electronic grade chlorine gas. Background technique [0002] High-purity chlorine gas is an indispensable basic material in the preparation of optical fiber communication, microelectronics, and high-temperature superconducting materials. With the rapid development of optical fiber communication and electronic industries, the amount of high-purity chlorine is increasing. The impact on the content of impurities in chlorine gas The requirements are becoming more and more stringent. The purity of chlorine gas currently used in the electronics industry is around 5N (99.999%). Even a very small amount of impurity gas entering the process may lead to a decline in the quality of the final electronic component product. How to accurately and reliably determine trace impurities in chlorine gas is one of the main problems to be faced in the production and application of chlori...
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IPC IPC(8): G01N30/88
CPCG01N30/88G01N2030/8872
Inventor 周庆美李东升
Owner SHANGHAI ZHENGFAN TECH