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A Method of Surface Deviation Inspection Based on Surface Topography Data

An inspection method and surface shape deviation technology, which is applied in the direction of instruments, measuring devices, and optical devices, can solve the problems of low interpretation and detection efficiency, achieve the effect of improving test repeatability, improving detection efficiency, and eliminating fatigue

Active Publication Date: 2018-07-06
FLIGHT AUTOMATIC CONTROL RES INST
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Problems solved by technology

However, the automatic interpretation method of surface deviation based on the interferogram is affected by the interferogram, and because the surface deviation is divided into radius deviation N, astigmatism deviation △ 1 N and local deviation △ 2 N ("Surface Deviation Inspection Method of Optical Parts" GB2831-81), it is necessary to find the respective maximum interferograms of the three parameters in the surface deviation, in which the astigmatism deviation needs to take two pictures, and then carry out the interferogram The deviation value of the surface shape can only be obtained through calculation, so the interpretation and detection efficiency of this method is low

Method used

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Embodiment Construction

[0047] The invention is a method for automatically calculating the surface shape of a laser gyro reflector substrate based on the test data of a digital laser interferometer, which includes the following steps:

[0048] 1. Measured with a digital laser interferometer

[0049] 1.1 Coat the back of the measured part with dark blue glass protective paint to eliminate the influence of parallelism interference fringes on the upper and lower surfaces of the part, and measure the measured part after the protective paint dries.

[0050] 1.2 Select the corresponding parameters in the measurement parameter options to eliminate the influence of optical path offset and part placement tilt.

[0051] 1.3 Fix the part on the adjustment frame for measurement, adjust the interference fringes to about 2 for measurement, and save the data.

[0052] 2. Read data with Matlab software

[0053] Matlab reads the data saved by the digital laser interferometer, and obtains the surface profile data cu...

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Abstract

The invention belongs to the technical field of surface shape deviation evaluation, and relates to a surface shape deviation evaluation method based on surface topography data. Aiming at the high-precision surface deviation measurement of the laser gyro plane mirror substrate, the digital laser interferometer and Matlab are used to measure the surface deviation parameters, and the automatic interpretation and evaluation method of the surface deviation of optical parts based on the surface topography data is realized.

Description

technical field [0001] The invention belongs to the technical field of surface shape deviation inspection, and relates to a surface shape deviation inspection method based on surface topography data. Background technique [0002] With the development of high-precision laser gyroscopes, the requirements for mirror substrates are getting higher and higher, and the surface deviation of parts is one of the important indicators to characterize the surface processing quality of mirror substrates. Surface deviation has an important impact on both the light reflection path and the sealing of the lens and the optical glue in the cavity, so it needs to be evaluated and monitored for quality. [0003] In the traditional surface shape detection, it is mainly done by experienced inspectors visually interpreting the interference fringes through a plane interferometer or a sample. This method needs to train the staff in advance, and the individual differences of the inspectors will also ca...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 王鑫高玫付冠军
Owner FLIGHT AUTOMATIC CONTROL RES INST
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