Method, processor, and system for performance parameter calibration of MEMS acceleration sensor

Abstract

The application provides a method, processor, and system for performance parameter calibration of a micro-electro-mechanical-system (MEMS) acceleration sensor. A closed-loop control rotation platform is driven to carry out 360-degree-rotation multi-point positioning on a to-be-measured MEMS acceleration sensor under the field of gravity and an input shaft accelerated speed, an output shaft accelerated speed, a pendulum shaft accelerated sped, and an actual output quantity of the to-be-measured MEMS acceleration sensor are obtained; on the basis of a preset model equation, an expected output quantity is obtained; and least-square-method fitting operation is carried out the expected output value and the actual output value to obtain various model parameters of the to-be-measured MEMS acceleration sensor. The deviation value and scale factor of the to-be-measured MEMS acceleration sensor among the model parameters do not contain quadratic nonlinear coefficients, cubic nonlinear coefficients, cross coupling sensitivity and cross coupling coefficients. Moreover, an influence on the final calibration result precision by the precision limitation of the standard sensor in the prior art is eliminated and thus the calibration precision and the calibration efficiency of the system can be improved substantially.

Description

technical field [0001] The present application mainly relates to the technical field of parameter calibration, and more specifically relates to a MEMS acceleration sensor performance parameter calibration method, processor and system. Background technique [0002] Micro-Electro-Mechanical-Systems (MEMS for short) is a new field of science and technology developed on the basis of microelectronics technology combined with precision mechanical technology. The development of micro-inertial measurement unit technology has led to the production of MEMS acceleration sensors. [0003] Among them, the MEMS acceleration sensor is an inertial detection element processed and formed on a silicon chip through a micromachining process. Due to its small size, light weight, low cost, low power consumption, and high reliability, and its processing technology Compatible with traditional integrated circuit technology, it is easy to realize digitization, intelligence and mass production. Theref...

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Problems solved by technology

[0005] In view of this, the present invention provides a MEMS acceleration sensor performance parameter calibration method, processor and system, which solves the problem of limited performance parameters for the calibration calibration of the MEMS acceleration sensor to be measured in the existing standard accelerometer comparison method, The calibration accuracy is low, and batch automatic calibration cannot be realized, so it cannot meet the technical problems of actual needs

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