Diaphragm-type piezoelectric actuator defect detection method

Abstract

The invention belongs to the defect detection technology of a piezoelectric driver, and relates to a defect detection method of a piezoelectric driver for a laser gyro. The invention belongs to a detection method of a diaphragm type piezoelectric driver. By testing the amplitude-frequency characteristic curve of the diaphragm type piezoelectric driver, that is, through the internal defects of the piezoelectric element and the defects of the connection between the piezoelectric ceramic sheet and the connection base, the influence of the piezoelectric element on the The impact of the vibration mode, so as to qualitatively detect the internal defects of the piezoelectric sheet and the continuity defect detection of the piezoelectric ceramic sheet and the connecting substrate. Relying on the method, the internal defect detection of the piezoelectric element and the continuous defect detection of the connection layer of the piezoelectric driver can be realized, the operation is simple and easy, and the non-destructive detection is realized. Compared with the traditional detection method, it can directly detect product defects and connection layer defects, and has the advantages of high detection efficiency, high detection accuracy and low detection cost.

Description

technical field [0001] The invention belongs to the defect detection technology of a piezoelectric driver, and relates to a defect detection method of a piezoelectric driver for a laser gyro. Background technique [0002] As the driver of the laser gyro, the diaphragm piezoelectric driver has a wide range of applications in the fields of military and civilian inertial navigation and guidance. Piezoelectric drivers for laser gyroscopes are generally composed of low expansion materials and piezoelectric ceramic sheets. [0003] Piezoelectric actuators have to work in high and low temperature environments for a long time, and are affected by adverse factors such as repeated expansion and contraction deformation and "internal stress". Once the internal defects of the piezoelectric actuator and the defects of the connection layer exceed a certain level, it is easy to cause defects or "micro cracks" "Expansion, which leads to the failure of the piezoelectric driver, which in turn...

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Problems solved by technology

[0003] Piezoelectric actuators have to work in high and low temperature environments for a long time, and are affected by adverse factors such as repeated expansion and contraction deformation and "internal stress". Once the internal defects of the piezoelectric actuator and the defects of the connection layer exceed a certain level, it is easy to cause defects or "micro cracks" "Expansion, which leads to the failure of the piezoelectric driver, which in turn leads to the failure of the entire laser gyro, which in turn causes the inertial navigation system to work abnormally

[0004] The internal defects of the piezoelectric actuator and the defects of the connection layer are generally detected by destructive tests, and the connection strength or connection area is detected through the cross-section. It is a random inspection, which has the characteristics of low detection efficiency and low detection accuracy.

However, through X-ray detection, it is difficult to locate the connection layer, it is difficult to detect the whole, the detection efficiency is low, and the detection accuracy is relatively low.

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