Incoherent laminated diffraction imaging system and imaging method achieving simultaneous multi-wavelength illumination

Abstract

The invention provides an incoherent laminated diffraction imaging method achieving simultaneous multi-wavelength illumination.The imaging method comprises the following imaging processes that at least one kind of different lasers are adopted for illumination; emitted laser light is regulated to be horizontally emitted through double total reflection mirrors and then subjected to beam combination through double beam splitter prisms; the combined laser light is subjected to beam expansion through a spatial filter, collimated through an apochromatic lens and then reflected to probes; the probes perform laminated scanning on a sample to be measured; intensity information of diffraction images of the probe scanning positions is recorded through an imaging detector; the recorded diffraction image intensity information is substituted into a multiplexing iterative algorithm based on laminated scanning, and complex amplitude distribution of the sample to be measured, complex amplitude distribution of the probes and spectrum weights are recovered.According to the imaging scheme and the corresponding algorithm, not only can the complex amplitude sample to be measured corresponding to the different wave bands be recovered, but also the spectrum weights of the different wave bands and complex amplitude distribution of the illumination probes corresponding to the different wave bands can be recovered.

Description

technical field [0001] The invention belongs to the field of ptychography technology (Ptychography), in particular to an incoherent ptychography scheme for simultaneously illuminating a sample to be tested with multiple wavelengths, and proposes a multiplex ptychography algorithm. Background technique [0002] In fields such as biology and material science, traditional optical imaging techniques using lenses cannot meet today's increasing demand for high-resolution imaging. The resolution of these imaging technologies is mainly limited by the numerical aperture of the lens, especially in the X-ray field, it is extremely difficult to manufacture a lens with a large numerical aperture. Therefore, as a new lens-free imaging technology, stack imaging is attracting more and more attention. [0003] Laminated imaging technology is a lensless scanning coherent diffraction imaging technology. By controlling the illumination beam or the sample to be tested, different positions on th...

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Problems solved by technology

[0004] conventional lamination imaging technology Single-wavelength illumination is often used, even if multi-wavelength illumination is used to improve the restoration quality, sequential illumination is adopted, see (ActaPhys.Sin.Vol.65, No.1(2016)014204), the operation i

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