Tunable micro-bolometer image element structure and image element array
A technology of microbolometer and pixel structure, applied in optical radiation measurement, electric radiation detector, radiation pyrometry, etc., can solve the problem of high electrostatic driving voltage and limitation of Fabry-Perot resonant cavity parallelism and other issues, to achieve the effect of improving parallelism, narrowing absorption bandwidth, and reducing electrostatic driving voltage
Active Publication Date: 2016-07-06
YANTAI RAYTRON TECH
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Abstract
The invention relates to a tunable micro-bolometer image element structure comprising a substrate, a bottom electrode, a reflection layer and an absorption layer. The bottom electrode is fixedly arranged at the upper end surface of the substrate. The substrate is provided with stand columns which are fixedly provided with a first supporting device. The absorption layer is fixedly connected with the first supporting device and arranged above the bottom electrode. The upper end of the absorption layer is fixedly provided with heat-sensitive material. The reflection layer is arranged between the bottom electrode and the absorption layer. The reflection layer is connected with the stand columns through a movable second supporting device. A Fabry-Perot resonator is formed between the reflection layer and the absorption layer. Reference potential is accessed to the reflection layer. Electrostatic driving voltage is accessed to the bottom electrode. Electrostatic force is formed between the reflection layer and the bottom electrode to push the reflection layer to longitudinally move. Compared with the structures in the prior art, depth of parallelism of the Fabry-Perot resonator can be improved, absorption bandwidth can be narrowed, absorption rate can be enhanced and electrostatic driving voltage can be reduced.
Application Domain
Pyrometry using electric radation detectors
Technology Topic
Absorption rateAbsorption bandwidth +7
Image
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