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Tunable micro-bolometer image element structure and image element array

A technology of microbolometer and pixel structure, applied in optical radiation measurement, electric radiation detector, radiation pyrometry, etc., can solve the problem of high electrostatic driving voltage and limitation of Fabry-Perot resonant cavity parallelism and other issues, to achieve the effect of improving parallelism, narrowing absorption bandwidth, and reducing electrostatic driving voltage

Active Publication Date: 2016-07-06
YANTAI RAYTRON TECH
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Problems solved by technology

[0005] The existing technology mainly has the following deficiencies: 1. High electrostatic driving voltage is required, especially in the case of small pixels; 2. The parallelism of the Fabry-Perot resonant cavity is limited

Method used

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  • Tunable micro-bolometer image element structure and image element array
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Embodiment Construction

[0021] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0022] Such as figure 1 and figure 2 As shown, a tunable microbolometer pixel structure includes a substrate 11, a bottom electrode 12, a reflective layer 13 and an absorption layer 14, and the bottom electrode 12 is fixedly placed on the upper surface of the substrate 11 , the substrate 11 is provided with a column, the column is fixedly provided with a first support device 17, the absorption layer 14 is fixedly connected with the first support device 17, and it is located above the bottom electrode 12 , the upper end of the absorbing layer 14 is fixedly provided with a heat-sensitive material 15; the reflective layer 13 is placed between the bottom electrode 12 and the absorbing layer 14, and the reflective laye...

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Abstract

The invention relates to a tunable micro-bolometer image element structure comprising a substrate, a bottom electrode, a reflection layer and an absorption layer. The bottom electrode is fixedly arranged at the upper end surface of the substrate. The substrate is provided with stand columns which are fixedly provided with a first supporting device. The absorption layer is fixedly connected with the first supporting device and arranged above the bottom electrode. The upper end of the absorption layer is fixedly provided with heat-sensitive material. The reflection layer is arranged between the bottom electrode and the absorption layer. The reflection layer is connected with the stand columns through a movable second supporting device. A Fabry-Perot resonator is formed between the reflection layer and the absorption layer. Reference potential is accessed to the reflection layer. Electrostatic driving voltage is accessed to the bottom electrode. Electrostatic force is formed between the reflection layer and the bottom electrode to push the reflection layer to longitudinally move. Compared with the structures in the prior art, depth of parallelism of the Fabry-Perot resonator can be improved, absorption bandwidth can be narrowed, absorption rate can be enhanced and electrostatic driving voltage can be reduced.

Description

technical field [0001] The invention relates to the technical field of infrared focal plane detectors, in particular to a tunable microbolometer pixel structure and a pixel array. Background technique [0002] The infrared focal plane array detector is the core component of the infrared imaging system, which can obtain the infrared radiation information of the target and convert it into a measurable electrical signal. There are two types of infrared focal plane array detectors: cooled and uncooled. Although the uncooled type is not as sensitive as the cooled type, it has many advantages such as room temperature operation, light weight and portability, and low cost. It is widely used in medical sensing, industrial monitoring, security and military fields. [0003] The microbolometer is a kind of uncooled infrared focal plane detector. Each pixel on the focal plane has a layer of suspended infrared absorbing material and heat sensitive material; when the target infrared radia...

Claims

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Application Information

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IPC IPC(8): G01J5/20
CPCG01J5/20G01J2005/0077G01J2005/202
Inventor 李聪科李辉
Owner YANTAI RAYTRON TECH
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