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Low-frequency heterodyne ineterferometer used for laser wavefront detection

A heterodyne interferometer and laser wave technology, applied in the optical field, can solve the problems of reduced spatial resolution, reduced sensitivity, low spatial resolution, etc., to achieve the effect of improving spatial resolution and increasing dynamic range

Inactive Publication Date: 2016-07-20
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] Laser wavefront detection generally adopts methods such as shearing interference and Shack-Hartmann sensor. Since shearing interference has no ideal standard surface, it is difficult to improve the detection accuracy. Terman sensor
[0005] At present, the Shaker-Hartmann detection system used for laser wavefront detection has a very low spatial resolution and cannot detect the mid- and high-frequency components in the wavefront error
The detectable dynamic range is small, and the dynamic range, spatial resolution, and sensitivity of the system are mutually restricted. To improve the dynamic range, the spatial resolution needs to be further reduced, and the sensitivity will also be reduced.

Method used

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  • Low-frequency heterodyne ineterferometer used for laser wavefront detection

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Embodiment Construction

[0025] The following describes the technical solutions in the embodiments of the present invention clearly and completely with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0026] The embodiment of the present invention provides a low-frequency heterodyne interferometer for laser wavefront detection, and its optical path structure is as figure 1 As shown, it mainly includes: the laser source to be tested, two half-wave plates, polarization beam splitter PBS, two mirrors, two acousto-optic frequency shifters, focusing lens, filter hole, collimator lens, beam splitter BS, expansion Beam mirror and detector; amon...

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Abstract

The invention discloses a low-frequency heterodyne ineterferometer used for laser wavefront detection, which adopts an acousto-optic frequency shifter heterodyne point diffraction interference system, greatly increases spatial resolution, can detect high-frequency errors in laser wavefronts, and enlarges dynamic range of measurement. In addition, an acousto-optic frequency shifter is adopted for phase shifting, no mechanical movement occurs, and the system has certain resistance to vibration and air flow interference.

Description

Technical field [0001] The present invention relates to the field of optical technology, in particular to a low-frequency heterodyne interferometer used for laser wavefront detection. Background technique [0002] The interference detection method has been used as early as a hundred years ago. It is a non-contact measurement and has the characteristics of large range, high sensitivity and high precision. It is widely used in high-precision detection. The principle is that an ideal wavefront is used as a reference light. , The other wavefront to be measured is used as the measuring light. When the two beams interfere, the optical path difference is generated due to the different phases at different positions and thus curved interference fringes are generated. The fluctuation of the wavefront to be measured can be judged. It was not until 1974 that Bruning et al. proposed phase-shifting interference technology, and introduced the synchronous phase detection technology in communicat...

Claims

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Application Information

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IPC IPC(8): G01J9/02
Inventor 张文喜李杨相里斌伍洲孔新新吕笑宇刘志刚郭晓丽
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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