Precipitation source having volume changeable type crucible

Abstract

Disclosed is a precipitation source having a volume changeable type crucible. The precipitation source comprises: a crucible containing an organic precipitate and having an overlaying structure, a heater heating the crucible and the organic precipitate, and at least one ejection nozzle arranged at one side of the crucible, wherein the overlaying structure is used for changing the internal volume. Through the construction, the provided precipitation source having a volume changeable type crucible has the following advantages that through change of the volume of the crucible containing the organic precipitate, volume control and thermal energy control are applied at the same time to fast accurately control the internal and external pressure differences of the crucible, and a relatively narrow precipitation angle is kept to reduce shadows. Furthermore, through the provided precipitation source, the process can be kept performing even if few organic precipitate is left at the final stage of precipitation.

Description

[0001] This application claims priority and benefit from Korean Patent Application No. 10-2015-0010850 filed with the Korean Intellectual Property Office on January 22, 2015, the entire contents of which are hereby incorporated by reference. technical field [0002] The technology described here relates generally to a deposition source, and more particularly to a deposition source with a volume-variable crucible for depositing organic deposits on a substrate through a mask. Background technique [0003] A display device is a device that displays an image, and organic light emitting diode displays are currently receiving much attention. [0004] Unlike a liquid crystal display device, an organic light emitting diode display having self-emission characteristics does not require a separate light source, and thus, the organic light emitting diode display may have reduced thickness and weight. [0005] In addition, organic light emitting diode displays have high-quality features ...

AI Technical Summary

Problems solved by technology

[0012] However, this method needs to sequentially perform heating, heat conduction, change of organic deposit temperature, change of organic deposit evaporation rate, and change of crucible internal pressure, thus causing a problem that rapid control cannot be performed

[0013] In addition, when the method performs control, at the final stage of deposition of a small amount of organic deposits remaining inside the crucible, the amount of organic deposits is smaller than the internal volume of the crucible, so it is difficult to control the pressure inside the crucible and maintain the deposition rate, so that it will cause The problem of stopping the process

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