Automatic focusing method of electron microscope

An electron microscope and automatic focusing technology, applied in the field of image processing, can solve the problem of uneven illumination of the subject image, and achieve the effect of simplified process, high focusing accuracy and simple operation.

Active Publication Date: 2016-08-10
THE EYE HOSPITAL OF WENZHOU MEDICAL UNIV
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  • Abstract
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Problems solved by technology

However, in its practical application, since the environment in which the electron microscope is used is not static, when the surface of the subject is under different ambient light or the surface material of the subject changes, the image of the subject will show uneven illumination.

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  • Automatic focusing method of electron microscope
  • Automatic focusing method of electron microscope

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Embodiment Construction

[0050] Such as figure 1 As shown, a preferred embodiment of the present invention provides a kind of electron microscope automatic focusing method, comprises the following steps:

[0051] Step 1. Initialize the stepping motor, set the stepping motor at the initial position, and use the camera to capture the first image; the initial position is the farthest focal length, so that the stepping motor moves from far to near, and the camera captures from far to near Image; the initial position can also be the closest focal length, so that the stepper motor moves from near to far, and the camera collects images from near to far

[0052] Step 2. Perform full image processing on the first image to obtain t regions with the most obvious image changes, and calculate and output the gradient jump values ​​of t regions at the same time; preferably, when processing the first image as a whole, select For the t non-adjacent areas where the image changes most obviously, the gradient jump value...

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Abstract

The invention discloses an automatic focusing method of an electron microscope. The method comprises the following steps of initializing a stepping motor, arranging the stepping motor at an initial position, acquiring a first picture; performing full-picture processing on the first picture, obtaining t areas with most obvious image changes, and outputting gradient outburst values of t areas; after one picture is processed, calculating and outputting t gradient outburst values, and frontwards moving the stepping motor by pi step lengths each time until the whole stroke is finished; respectively fitting all gradient outburst values and corresponding motor positions in the t areas for forming t secondary curves, finding out a motor position which corresponds with a peak value from the secondary curves, wherein the position is the focal length which corresponds with a highest-definition image; moving the stepping motor to the position for finishing focusing, and simultaneously acquiring the image and displaying. The automatic focusing method can eliminate the effect of different ambient lights and different photographed object material surfaces on the automatic focusing effect of the electron microscope.

Description

technical field [0001] The invention relates to the field of image processing, in particular to an automatic focusing method of an electron microscope. Background technique [0002] Electron microscopes are used more and more widely in modern life and scientific research, and autofocus technology is an important technology in microscope systems. In the prior art, the autofocus technology is mainly divided into two categories: the first type is the active type that realizes autofocus through distance information, and the second type is the passive type based on digital image technology. Among them, the passive autofocus method collects images Sequences are widely used to analyze the focus state of the system without the need for additional equipment. In recent years, according to the characteristics of the electron microscope, many adaptive focusing methods have emerged, but they usually set certain preconditions, such as the environment does not change, and the subject is s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/21H04N5/232
CPCH01J37/21H04N23/67
Inventor 苏增识
Owner THE EYE HOSPITAL OF WENZHOU MEDICAL UNIV
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