Automatic focusing method of electron microscope
An electron microscope and automatic focusing technology, applied in the field of image processing, can solve the problem of uneven illumination of the subject image, and achieve the effect of simplified process, high focusing accuracy and simple operation.
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[0050] Such as figure 1 As shown, a preferred embodiment of the present invention provides a kind of electron microscope automatic focusing method, comprises the following steps:
[0051] Step 1. Initialize the stepping motor, set the stepping motor at the initial position, and use the camera to capture the first image; the initial position is the farthest focal length, so that the stepping motor moves from far to near, and the camera captures from far to near Image; the initial position can also be the closest focal length, so that the stepper motor moves from near to far, and the camera collects images from near to far
[0052] Step 2. Perform full image processing on the first image to obtain t regions with the most obvious image changes, and calculate and output the gradient jump values of t regions at the same time; preferably, when processing the first image as a whole, select For the t non-adjacent areas where the image changes most obviously, the gradient jump value...
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