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Linear heating source

A heating source, linear technology, used in ion implantation plating, metal material coating process, coating and other directions, can solve the problems of inability to adjust the distribution of vapor deposition material gas, easy blockage of pore size, etc., to avoid uniformity reduction, The effect of preventing the blockage of the air outlet and reducing the maintenance cost

Active Publication Date: 2016-08-17
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] The gas flow of the organic material comes out of the crucible through the gas outlet of the heating source. In the prior art heating source, the gas outlet is a round hole. One heating source can only adapt to one type of product, and cannot adjust the vapor deposition material gas. distribution, small pore size is easy to clog

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Embodiment Construction

[0024] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0025] The present invention firstly provides a linear heating source, such as Figure 1A , 1B As shown, there is a heating chamber 101 having an air outlet part 102 with an adjustable air outlet, for example, which can be obtained from Figure 1A The larger width shown adjusts to the Figure 1B The smaller width shown, the gas outlet is used to allow the gas containing the vapor deposition material to pass through.

[0026] In the linear heating source provided by the embodiment of the present invention, the width of the gas outlet can be adjusted, so that the linear heating source can adjust the gas distribution of the evaporation material, and expand the applicable range of the linear heating source; at the same time, when cleaning the gas outlet part...

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Abstract

The invention provides a linear heating source. The linear heating source comprises a heating chamber with an air outlet component. The air outlet component is provided with an air outlet, and the size of the air outlet can be adjusted. The air outlet is used for allowing air containing an evaporation material to pass through. The linear heating source can adjust the air distribution of the evaporation material, thereby avoiding blockage, improving efficiency and lowering the cost.

Description

technical field [0001] The invention relates to production technology, in particular to a linear heating source. Background technique [0002] At present, the mainstream preparation process of Organic Light-Emitting Diode (OLED) is evaporation technology, which mainly uses the principle of thermal evaporation of organic materials, that is, to fill organic materials into a heating source, and in a vacuum environment , heating up to make the solid organic material melt and volatilize or sublimate to form a gaseous state, and the gas flow of the organic material is deposited on the glass substrate to form layers of organic thin films to prepare OLED devices. [0003] The gas flow of the organic material comes out of the crucible through the gas outlet of the heating source. In the prior art heating source, the gas outlet is a round hole. One heating source can only adapt to one type of product, and cannot adjust the vapor deposition material gas. Distribution, small pore size ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/24
Inventor 邹清华郭书鹏姚固李元虎
Owner BOE TECH GRP CO LTD
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