An integrated double quartz tuning fork resonant sensitive element and force measuring module

Abstract

The invention discloses an integrated biquartz tuning fork resonance sensing element and a force measuring module. The resonance sensing element comprises a force applying structural part, a first tuning fork and a second tuning fork, wherein the first tuning fork and the second tuning fork are arranged at the two ends, the end of the first tuning fork and the end of the second tuning fork are each provided with a base, the first tuning fork comprises a first fork finger and a second fork finger which are connected between the force applying structural part and the corresponding base, and the second tuning fork comprises a third fork finger and a fourth fork finger which are connected between the force applying structural part and the corresponding base; the surface of the first fork finger, the surface of the second fork finger, the surface of the third fork finger and the surface of the fourth finger are coated with electrode regions, the first tuning fork and the second tuning fork work in an in-plane bending vibration mode, and resonant frequency is sensitive to axial pulling and compressive stress. The force applying structural part, the first tuning fork, the second tuning fork and the bases are quartz structural bodies formed integrally. According to the resonance sensing element, the problems that after different materials are assembled, thermal expansion coefficients are different, thermal performance is not matched, adhesive has creep deformation when temperature changes and internal stress exists can be solved, and force measuring precision is high.

Description

technical field [0001] The invention relates to the field of sensor detection, in particular to an integrated dual-quartz tuning fork resonant sensitive element and a force-measuring module. Background technique [0002] Quartz double-ended fixed tuning fork is a force-frequency resonator based on in-plane bending vibration mode. Its structure is that two tuning fork fingers are connected between two fixed ends to form a double-beam tuning fork structure. Since the two beams of the resonator vibrate in opposite directions with a phase difference of 180 degrees, the force and moment generated at the fixed end of the beam connection cancel each other out to reduce the loss of vibration energy and obtain a high quality factor. A special vibration isolation system is required, and the piezoelectric effect of the quartz crystal itself can be used to excite and detect the vibration frequency of the double beam without adding additional devices. The quartz double-ended fixed tunin...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the existing double quartz tuning fork resonant element existing in the prior art. Performance mismatch, creep and failure of the adhesive when the temperature changes significantly affect the accuracy of the resonant element. An integrated double quartz tuning fork resonant sensitive element is provided, and a force measurement module is also provided.

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