In-situ testing sample stage and in-situ testing method

Abstract

The invention discloses an in-situ testing sample stage and an in-situ testing method. The in-situ testing sample stage comprises a microscope chamber, a TEM (transmission electron microscope) sample holder, an electron beam emission gun, a secondary electron probe, a focused ion beam emission gun, a back scattering electron probe and an electron back scattering probe. A chamber is arranged between the front surface and the rear surface of the microscope chamber, the back scattering electron probe and the focused ion beam emission gun penetrate a second side surface of the microscope chamber, the electron beam emission gun penetrates the upper surface of the microscope chamber, the focused ion beam emission gun penetrates a first side surface of the microscope chamber, a first flange hole is formed in a fourth side surface of the microscope chamber, a second flange hole is formed in a third side surface of the microscope chamber, and the TEM sample holder is mounted in the first flange hole or the second flange hole. A focused ion beam electron beam microscope and a transmission electron microscope can be combined in use, cut block materials can be directly transferred to a transmission electron microscope sample stage without pollution or man-made damage, and in-situ testing analysis of nano scale and atomic scale can be realized by combining microscopic analysis functions of the focused ion beam electron beam microscope and the transmission electron microscope.

Description

technical field [0001] The invention relates to the field of sample testing, in particular to an in-situ testing sample platform and an in-situ testing method. Background technique [0002] The focused ion beam electron beam microscope has the characteristics of wide application and multiple analysis functions, while the TEM sample rod of the transmission electron microscope has the characteristics of compact structure, diverse functions, and the characteristics of extreme conditions for in-situ, harsh conditions of bulk materials, thin film materials, Testing and analysis of the microstructure and various performance characterizations of nanomaterials, functional materials, and biomaterials. [0003] In the prior art, the focused ion beam electron beam microscope and the transmission electron microscope are used separately, and the use of the two often has a sequential relationship, such as cutting a transmission electron microscope with a suitable position and shape from a...

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Problems solved by technology

[0003] In the prior art, the focused ion beam electron beam microscope and the transmission electron microscope are used separately, and the use of the two often has a sequential relationship, such as cutting a transmission electron microscope with a suitable position and shape from a bulk material Electron microscope analyzes the sample, and then manually transfers and fixes the prepared sample to the TEM sample stage. Since the size of the sample prepared by using the focused ion beam is between micrometers and nanometers, it is very inconvenient to transfer and fix the sample. Not only may it pollute the sample, but it may also damage or destroy the sample observed in situ, which will affect the test data

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