Electrochemical inertia sensor based on planar interdigital electrode structure

Abstract

The invention relates to an electrochemical inertial sensor with a planar interdigitated electrode structure, belonging to the technical field of inertial sensing. Including interdigitated electrode plate, sensitive liquid, U-shaped shell, elastic rubber membrane and detection circuit. The interdigitated electrode plate is an insulating flat plate with two pairs of interdigitated electrodes symmetrically arranged on the surface, and the interdigitated electrodes are used as two pairs of cathode / anode electrodes for electrochemical reactions; Electrolyte for oxidation / reduction reactions. The U-shaped housing and the interdigitated electrode plates jointly form a flow channel for the sensitive liquid, both ends of the flow channel are sealed by elastic rubber membranes, and the sensitive liquid flows relative to the surface of the interdigitated electrodes under the action of external inertial force. The invention has the advantages of simple structure, convenient manufacture, low cost, mass production, wide application range and strong practicability.

Description

technical field [0001] The invention relates to the technical field of inertial sensing, in particular to an electrochemical inertial sensor with a planar interdigital electrode structure. Background technique [0002] Inertial sensors are sensors that detect acceleration, tilt, shock, vibration, rotation, and multi-degree-of-freedom motion, including linear and angular acceleration sensors, and have important applications in the fields of navigation and positioning, motion control, and vibration measurement. Inertial sensors have always been the focus of research in the field of inertial technology in various countries, especially the use of various new materials and technologies in inertial sensors. [0003] The mass-spring-damper resonant system is the simplest and commonly used inertial measurement system. Through a suitable electromechanical transducer device, the displacement, velocity and acceleration of the inertial mass body relative to the fixed frame can be conver...

AI Technical Summary

Problems solved by technology

[0006] At present, electrochemical inertial sensors are only used as geophones / seismometers, and are used in seismic wave measurements that require high motion measurement accuracy and low sensor size requirements, while in automotive, precision agriculture, industrial automation, medical equipment, mobile phones, navigation Wide range of medium and low-precision inertial sensor demand fields such as game consoles and game consoles have not been applied, and the sensor size, structure and cost are the main factors

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