Photoelectric detector based on graphene planar junction
A photodetector and graphene technology, applied in the field of photodetection, can solve problems such as large dark current, unfavorable photodetector application development, and low efficiency, so as to improve photoresponsivity, avoid graphene chemical doping process, The effect of simple structure
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[0039] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
[0040] The graphene planar junction type photodetector that the present invention proposes in detail below in conjunction with accompanying drawing, as Figure 2-4 shown. The main process steps include:
[0041] 1. The substrate 6 is prepared. The substrate 6 is an insulating substrate or a non-insulating substrate with an insulating layer. In this embodiment, a heavily doped P-type silicon substrate covered with thermally oxidized...
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