Uniformity multi-arc ion coating device

Abstract

The invention relates to a uniformity multi-arc ion coating device, and belongs to the technical field of vacuum coating. The uniformity multi-arc ion coating device comprises multi-arc targets, a vacuum chamber, a path rail and a frame, wherein the path rail and the frame are arranged in the vacuum chamber. The frame is provided with a supporting piece, a center shaft and a rotation disc. The supporting piece used for supporting the frame is movably arranged on the path rail. The center shaft is sleeved with the rotation disc. The rotation disc is provided with a self-rotation shaft rotating relative to the rotation disc. The self-rotation shaft is provided with a clamp, and the multi-arc targets installed on the vacuum chamber face the clamp. The coating device further comprises a linear drive mechanism. The vacuum chamber is provided with a second sealing device, and the linear drive mechanism penetrates the second sealing device to be connected with the frame. A hydraulic cylinder penetrates the second sealing device to be connected to an extending-out arm. A grabbing claw used for grabbing the extending-out arm is arranged at the end portion of a piston rod of the hydraulic cylinder. According to the uniformity multi-arc ion coating device, correction of uniformity of workpiece coating can be achieved, and the overall quality of products is improved.

Description

technical field [0001] The invention relates to the technical field of coating, in particular to a uniform multi-arc ion coating equipment. Background technique [0002] In the prior art coating method and equipment, multiple multi-arc targets are arranged in groups, and the targets of the multi-arc targets are misplaced and installed with a certain distance, resulting in a ratio of the position of the targets of the multi-arc targets facing the workpiece. The thickness of the film layer of the workpiece next to it is inconsistent, and the thickness gap is large. Even if the workpiece bias is used to enhance the uniformity of the thickness, the actual effect is not ideal. The only way to use multi-arc target coating as the base, and then use magnetic Controlled sputtering target is used to coat the film to ensure uniformity, but this leads to low production efficiency, high production cost, and low competitiveness in the product market. Contents of the invention [0003] ...

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Problems solved by technology

[0002] The coating method and equipment in the prior art adopt a plurality of multi-arc targets arranged in groups, and the targets of the multi-arc targets are misplaced and installed with a certain distance, resulting in a ratio of the position of the targets of the multi-arc targets facing the workpiece. The thickness of the film layer of the workpiece at the side is not consistent, and the thickness gap is large. Even if the workpiece bias is used to enhance the uniformity of the thickness, the actual effect is not ideal. The only way to use multi-arc target coating as the base, and then use magnetic Controlled sputtering target to coat the film to ensure uniformity, but this leads to low production efficiency, high production cost, and weak competitiveness in the product market

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