High speed micro scanning dynamic focusing device and focusing tracking method
A focusing device, high-speed technology, applied in microscopes, instruments, optics, etc., can solve the problems of time-consuming, unsuitable for high-speed microscopic scanning dynamic focusing, complex search process, etc., to achieve high reliability, improve focusing response speed and focusing The effect of tracking accuracy
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[0051] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0052] This embodiment provides a dynamic focus device and a focus tracking method for high-speed micro-scanning;
[0053] The embedded high-speed focus tracking device is composed of an objective lens 102, a liquid lens focus detection module, an intelligent focus camera 109, a focus tracking execution module, and a focus control module 110;
[0054] The objective lens 102 is an infinity plan apochromatic objective lens of 20×, NA0.65, the field of view of the object side is about 1 mm×1 mm, and the de...
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