Polysiloxane compositions and coatings for optoelectronic applications
A composition and technology of siloxane resin, applied in the direction of coating, etc., can solve the problems of increasing manufacturing cost, not satisfying diffusion barrier layer, etc.
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Embodiment 1
[0109] Example 1 - Compositions with different alkyl carbon contents
[0110] Polymer A: Phenyl TEOS was reacted in isopropanol solvent at 100° C. in the presence of acid catalyst and water for 24 h. After the reaction, the solvent was distilled off to obtain a solid polymer. The polymer was then dissolved and reprecipitated from a suitable solvent system and dried under vacuum at 50°C overnight and ground to a powder.
[0111] Polymer B: Predetermined amounts of phenyl TEOS and methyl TEOS were reacted in isopropanol solvent at 100 °C for 24 hours in the presence of acid catalyst and water and 0.5% DMDEOS. After the reaction, the solvent was distilled off to obtain a solid polymer. The polymer was then dissolved and reprecipitated from a suitable solvent system and dried under vacuum at 50°C overnight and ground to a powder.
[0112]Composition 1: 90 wt% polymer B and 10 wt% polymer A in PGMEA in the presence of 1-5 wt% surfactant and 1-5 wt% catalyst based on the final so...
Embodiment 12 and 13
[0121] Table 1: Percentage of Alkyl and Aryl Carbons
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[0124] As shown in Table 1, compositions having greater than 20% alkyl carbons were prepared. Also as shown in Table 1, compositions having various levels of difunctional siloxane content were prepared.
Embodiment 2
[0125] Example 2 - Effect of Silicone Resin Blends on Thickness of Crack Free Films
[0126] Samples of Comparative Composition C ("Comparative Composition C") and Composition 5 ("Composition 5") as prepared in Example 1 were deposited on silicon substrates at various thicknesses, as shown in Table 2 below. shown in . Duplicate samples were then cured at 380°C for 30 minutes in a nitrogen atmosphere, followed by a second cure at 380°C for 10 minutes in air. After each cure, the film was inspected to determine if the film had ruptured. The results are provided in Table 2 below.
[0127] Table 2: Crack Results - Silicon Substrate
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[0129] As shown in Table 2, the Comparative Composition C sample had a crack threshold on silicon of about 2.3 μm. In comparison, the Composition 5 sample had a crack threshold of about 3.1 μm.
[0130] Next, samples of Comparative Composition C and Composition 5 prepared as in Example 1 were deposited on copper / silicon nitride substr...
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