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Film thickness detection device

A detection device, film thickness technology, applied in the direction of measuring device, electromagnetic measuring device, electric device, etc., can solve the problem of low detection accuracy and achieve the effect of high detection accuracy

Active Publication Date: 2018-05-25
WEIHAI HUALING OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The main purpose of this application is to provide a film thickness detection device to solve the problem of low detection accuracy of the film thickness detection device in the prior art

Method used

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Embodiment Construction

[0030] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0031] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.

[0032] As introduced in the background art, the detection accuracy of the film thickness detection device in the...

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Abstract

Disclosed is a film thickness detection device, including a common unit (1) and a detection unit (2); the common unit (1) comprises at least one common electrode (11); the detection unit (2) comprises at least one sensor chip (21) and a signal processing unit (23); the sensor chips (21) are opposite to the common unit (1) in a first direction and are arranged at intervals; the spaces between the common unit (1) and the sensor chips (21) form a transport channel for a to-be-tested film; each of the sensor chips (21) comprises at least one row of multiple detection electrodes (211) arranged along a second direction; the second direction is perpendicular to a moving direction of the to-be-tested film; the first direction is perpendicular to a first plane; the first plane is parallel to the second direction; the sensor chips (21) are configured to induce electrical signals on the common electrodes (11) and output the electrical signals; and the signal processing unit (23) is electrically connected with the sensor chips (21), processes the electrical signals output by the sensor chips (21) and outputs the electrical signals.

Description

technical field [0001] The present application relates to the technical field of thickness detection, in particular, to a film thickness detection device. Background technique [0002] On-line continuous thickness measurement of sheet-like items, such as paper, bills, plastic film to be tested, textile items, etc., is playing an increasingly important role in the production, testing, processing, and recycling of their products. At present, the detection technology of the film thickness to be measured includes the use of Hall devices, reflective ultrasonic detection, transmission ultrasonic detection, electromagnetic induction detection, eddy current detection and other technologies. However, the detection devices corresponding to these technologies are large in size and high in cost, which is not conducive to the application of these technologies. [0003] In recent years, the detection technology of the thickness of the film to be measured through the electrostatic inducti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/06
CPCG01B7/08G01B7/06G07D7/164G01R27/2605G01B7/003G01B7/023G01B7/105G01B7/14G01B21/08H01L22/12H01L22/34H01L2924/00H01L2924/0002
Inventor 戚务昌
Owner WEIHAI HUALING OPTO ELECTRONICS CO LTD
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