Device and method for measuring gas mass transfer diffusion coefficient of thin film materials
A technology of diffusion coefficient and thin film material, applied in the field of thin film material measurement device, can solve the problems of inaccurate measurement data, inability to obtain gas diffusion amount data quickly, and inability to do so.
Active Publication Date: 2019-04-23
辽宁博仕创业服务中心管理有限公司
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Problems solved by technology
[0005] Low-strength film materials are not enough to withstand the large pressure difference on both sides, and the large pressure difference cannot be used to speed up the gas transmission rate; if the thickness is increased, the gas diffusion data cannot be quickly obtained for low-permeability film materials. If the measurement time is too long, the measurement data will be inaccurate
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Embodiment Construction
[0049] The present invention will be described in detail below in conjunction with the embodiments shown in the accompanying drawings.
[0050] In the figure: 1-measurement chamber, 2-vacuum gauge in the measurement chamber, 3-flange blind plate or test sample, 4-flange gland, 5-inflatable chamber pressure gauge, 6-pressure control regulating valve, 7-inflatable Chamber, 8-inflatable chamber door, 9-vacuum pump, 10-inflatable chamber valve, 11-deflation valve, 12-measurement chamber valve, 13-sealing ring, 14-sealing flange, 15-middle partition.
[0051] The device of the present invention is made up of following parts: two parallel vacuum chambers---measuring chamber 1 and air-filling chamber 7 that have measured background air leakage rate, are separated by a vacuum chamber body and utilize middle partition 15 to form, middle partition A round hole is set on the plate as an air extraction channel and a sealing flange 14 is provided. The sealing flange 14 faces the side of th...
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An apparatus and a method for measuring gas mass-transfer diffusivity of film material relate to an apparatus and a method for measurement of a film material. The apparatus comprises two connected vacuum chambers, that is, a measurement chamber and a plenum chamber of which the background leak rate has been determined. The measurement chamber and the plenum chamber are connected through an air exhaust channel with a sealing flange, the sealing flange faces to the side of the plenum chamber, and flange covers and seal rings are utilized for sealing and fixing a disc-shaped blind flange or a test piece; the plenum chamber is provided with an openable plenum chamber door for facilitating mounting or dismounting of the blind flange or the test piece; and the plenum chamber is provided with a plenum-chamber pressure gage, a pneumatic pipeline with a pressure-adjusting control valve and a pumping pipeline with a plenum-chamber valve. The apparatus employs a porous ceramic support material and accelerates gas transportation rate by utilizing a vacuum pump for making a larger pressure difference, and for film materials with low permeability, the apparatus can rapidly obtain stable gas pressure and gas flux data and has accurate measurement result.
Description
technical field [0001] The invention relates to a thin film material measuring device and method, in particular to a thin film material gas mass transfer diffusion coefficient measuring device and method. Background technique [0002] At present, the gas chamber method and the mass method are mainly used to measure the gas mass transfer diffusion coefficient in solid materials. The gas chamber method is to place the measured material in the middle of two chambers or the outlet of a single chamber, and calculate the mass transfer characteristic parameters of the material by monitoring the concentration change of the target gas on both sides of the material or detecting the concentration of the target gas in the equilibrium state. If two static chambers are used, the calculation results are uncertain, so in order to ensure the accuracy of the measurement data, the dynamic chamber method is generally used. This method requires a large pressure difference on both sides of the t...
Claims
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IPC IPC(8): G01N13/00
CPCG01N13/00G01N2013/003
Inventor 刘军李洪仁赵丽丽张世伟丁济琳
Owner 辽宁博仕创业服务中心管理有限公司