Deformation measurement and control experimental system of thin film structure
A thin-film structure and control experiment technology, applied in general control systems, control/regulation systems, measurement devices, etc., can solve the problems of inability to verify the validity of control algorithms, inability to adjust in real time, and low reliability
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[0020] refer to figure 1 , The present invention provides a film structure deformation measurement and control experiment system, including a film structure test piece 1, a deformation measurement system 2, a deformation control system 3 and a monitoring control system 4. The thin film structure test piece 1 includes a thin film front 13 and a ball screw adjustment mechanism 14 capable of adjusting the shape of the thin film front 13. The deformation measurement system includes two photogrammetric cameras. Shoot the film front at different angles, and send the captured images to the monitoring and control system. The monitoring and control system obtains the three-dimensional surface data of the film front through image processing and transmits the data to the deformation control system. The deformation control system according to the three-dimensional surface The data calculates the required adjustment amount of the film front, and drives the ball screw adjustment mechanism t...
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