Structure capable of improving output displacement and inherent frequency of piezoelectric flexible mechanism

A flexible mechanism and displacement technology, applied in piezoelectric devices/electrostrictive devices, etc., can solve problems such as limited effect, achieve large displacement output and frequency response performance, increase output displacement, and improve the effect of natural frequency

Inactive Publication Date: 2016-11-23
GENERAL ENG RES INST CHINA ACAD OF ENG PHYSICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The common feature of these patents is to improve and improve the performance of the flexible mechanism structurally, but the effect is limited

Method used

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  • Structure capable of improving output displacement and inherent frequency of piezoelectric flexible mechanism
  • Structure capable of improving output displacement and inherent frequency of piezoelectric flexible mechanism
  • Structure capable of improving output displacement and inherent frequency of piezoelectric flexible mechanism

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Embodiment Construction

[0019] The present invention will be further described below in conjunction with accompanying drawing:

[0020] Such as figure 1 , figure 2 , image 3 , Figure 4 and Figure 5 As shown, the present invention is a structure for improving the output displacement and natural frequency of a piezoelectric flexible mechanism, including a diamond-shaped flexible mechanism 3, a piezoelectric stack 1, a piezoelectric sheet 2, a displacement sensor 9, a flexible hinge 8, a data acquisition system 12, Power amplifier 10 and controller 11, diamond-shaped flexible mechanism 3 includes flexible beam 4, displacement input end 5, rigid fixed end 6 and rigid output end 7, two displacement input ends 5 are arranged symmetrically, rigid fixed end 6 and rigid output end 7 Symmetrically arranged, the line between the two displacement input ends 5 is perpendicular to the line between the rigid input end and the rigid output end 7, and the four flexible beams 4 are sequentially connected to th...

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Abstract

The invention discloses a structure capable of improving output displacement and inherent frequency of a piezoelectric flexible mechanism. The structure comprises a rhombus-shaped flexible mechanism, a piezoelectric stack, piezoelectric sheets, a displacement sensor, a data acquisition system, a power amplifier and a controller, wherein the displacement sensor is arranged at a rigid output end and the plurality of piezoelectric sheets are fixedly arranged at the two ends of a flexible beam respectively; a signal output end of the displacement sensor is connected with a signal input end of the data acquisition system; the signal output end of the data acquisition system is connected with the signal input end of a controller; and signal output of the controller is amplified through the power amplifier and then is connected with a driving signal input end of the piezoelectric stack / piezoelectric sheets. An additional bending moment is generated through sticking the piezoelectric sheets so that the output displacement of the rhombus-shaped flexible mechanism is enlarged and the inherent frequency of the flexible mechanism is not reduced; and furthermore, the inherent frequency of the flexible mechanism is improved through designing relatively thick flexible beam and flexible hinge, and a lost displacement amplification ratio is compensated by the bending moment provided by the additional piezoelectric sheets.

Description

technical field [0001] The invention relates to the field of precision drive and control, in particular to a structure for improving the output displacement and natural frequency of a piezoelectric flexible mechanism. Background technique [0002] In recent years, with the development of precision machinery technology, especially the emergence of micro-nano technology, science and technology have officially entered the "submicron-nano" era. Electronic, optical, mechanical, and aerospace fields such as scanning electron microscopes, optical instruments, and precision machining are in urgent need of high-precision, high-resolution, and high-speed drive and positioning platforms. Due to the advantages of high resolution, high stiffness and large output, piezoelectric ceramics are widely used in precision drive and control, but the output displacement of piezoelectric ceramics is extremely small, even for stacked piezoelectric ceramics, the output displacement is generally no mo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/09
CPCH10N30/20
Inventor 凌明祥刘谦李思忠黎启胜郑星曹军义
Owner GENERAL ENG RES INST CHINA ACAD OF ENG PHYSICS
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