A three-degree-of-freedom precision positioning platform in xyθ plane
A precision positioning and degree of freedom technology, applied in the direction of machine/support, supporting machine, mechanical equipment, etc., can solve the problems of assembly precision positioning influence, multiple assembly procedures, complex structure, etc., and achieve simple and compact structure, large stroke and High-bandwidth and high-precision displacement output, the effect of large output displacement
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[0024] The present invention will be further described below in conjunction with accompanying drawing:
[0025] Such as figure 1 and figure 2 As shown, a XYθ plane three-degree-of-freedom precision positioning platform of the present invention includes a piezoelectric ceramic 1, a composite diamond displacement amplification mechanism 2, a bridge displacement amplification mechanism 3, a motion platform 4 and a fixed frame 5, and the piezoelectric ceramic 1 is installed on In the composite diamond-shaped displacement amplification mechanism 2, four composite diamond-shaped displacement amplification mechanisms 2 are arranged in parallel and are respectively located at the four corners of the fixed frame 5. The moving platform 4 is located at the center of the fixed frame 5. The displacement amplifying mechanism 3 is respectively connected with the compound rhombic displacement amplifying mechanism 2 located on both sides of the motion platform 4 .
[0026] The composite dia...
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