Integrated axial direction precision fine tuning apparatus

A fine-tuning device, an integrated technology, applied in the direction of exposure device, installation, microlithography exposure equipment, etc. , Improve the effect of axial movement accuracy

Active Publication Date: 2016-12-21
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims to overcome the disadvantages of complex structure, difficult processing and high assembly precision of existing axial position adjustment devices, and provides an integrated axial precision fine adjustment device

Method used

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  • Integrated axial direction precision fine tuning apparatus
  • Integrated axial direction precision fine tuning apparatus
  • Integrated axial direction precision fine tuning apparatus

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Embodiment Construction

[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

[0027] An integrated axial fine-tuning device, such as figure 1 , 2 As shown, it includes a mirror frame 1 and a driver 2. The mirror frame 1 is a ring structure, and the ring structure is integrally cut to form a translation part 1-1, a fixed part 1-2 and a connecting part. The translation part 1-1 and the fixed part 1- 2 are separated by the cutting line 1-5 along the circumference, the cutting line 1-5 is a discontinuous line, and a connection part is formed at the discontinuity, the connection part is a hinge formed by integral cutting, and the connection part is used for the tran...

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Abstract

The invention relates to the technical field of deep UV lithography object lenses and concretely discloses an integrated axial direction precision fine tuning apparatus. The integrated axial direction precision fine tuning apparatus comprises a lens frame and a driver. The lens frame is a circular ring structure and comprises a translation part, a fixed part and a connection part. The translation part and the fixed part are divided along the indirect cutting line of the circumference. The connection part is an integratedly cut hinge which is arranged at the indirecion part of the cutting line and is used for the connection of the translation part and the fixed part. The driver is arranged on the hinge and is used for the axial direction fine tuning of the lens frame. Through the design of a one-piece circular ring structure, the axial direction precision fine tuning apparatus has the advantages of a simple and compact structure, convenient processing and assembling and the improvement of axial motion precision.

Description

technical field [0001] The invention relates to the technical field of deep ultraviolet projection lithography objective lens, and specifically discloses an integrated axial precision fine-tuning device. Background technique [0002] Projection lithography objective lens is the key equipment for manufacturing large-scale integrated circuits. With the continuous improvement of the computing power of integrated circuits, the characteristic line width of integrated circuits is continuously subdivided, and the resolution of projection lithography objective lenses needs to be continuously improved. In order to improve the resolution of the projection lithography objective lens, during the assembly and adjustment stage, the position of some frames and lenses needs to be continuously compensated to obtain the optimal system aberration. It is difficult to meet the accuracy requirements only by processing and assembly tolerances. Finely adjust the axial position. In the exposure sta...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/00G03F7/20
CPCG02B7/00G03F7/70275
Inventor 陈华男郭抗倪明阳李显凌张巍隋永新杨怀江
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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