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Optical inner surface measuring device

A measurement device, optical technology, applied in the direction of measurement devices, optical devices, instruments, etc., can solve problems such as inability to obtain measured values, mixed noise data, distortion, etc.

Active Publication Date: 2019-02-15
NAMIKI PRECISION JEWEL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, this document shows a mechanism for rotating and emitting a beam. If the rotating motor that emits the beam rotates at a high speed, vibration or non-recurring vibration occurs in the rotating shaft, and the collected cross-sectional shape data of the inner peripheral surface of the object to be measured Noise is mixed in or distortion occurs in the data, and the real measurement value cannot be obtained

Method used

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  • Optical inner surface measuring device

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Embodiment 1

[0060] The first embodiment of the optical inner surface measuring device of the present invention will be described.

[0061] Figure 1~Figure 10 The embodiment of the optical inner surface measuring device according to the present invention is shown.

[0062] figure 1 It is an optical inner surface measuring device according to the first embodiment of the present invention. A bracket 81 is fixed to the base 80, and the slider 82 is moved up and down together with the probe 28 by the slider motor 83. The object to be measured 61 is set on the base 80, and the probes 28 and 58 enter and exit figure 2 The deep hole 61a of the measured object 61 is shown. The light rays incident on the probes 28 and 59 pass through the tube 6, pass through the connecting portion 84 of the measuring machine main body 85, and enter the interference analysis section 88, are analyzed by the computer 89, and an image is displayed on the monitor 90.

[0063] This optical inner surface measuring device has...

Embodiment approach 2

[0105] Picture 12 It is a cross-sectional view of the optical inner surface measuring device according to the second embodiment of the present invention. The fixed-side optical fiber 31 that guides the light beam from the rear end side to the front end side of the probe 59 is inserted into the hole of a sufficiently long tube 36 and fixed by an optical fiber fixing tool 34.

[0106] The rotating-side optical fiber 32 is rotatably provided on the tip side of the fixed-side optical fiber 31. On the tip of the rotating-side optical fiber 32, first optical path conversion mechanisms 33a, 33b composed of substantially planar mirrors and the like are rotatably mounted independently of the rotating-side optical fiber 32 by a first motor 42, and are configured to rotate The light is radiated to the entire circumference.

[0107] In addition, a second optical path conversion is installed at the tip of the rotating-side optical fiber 32 to condense the light beams arriving through the fixe...

Embodiment 3

[0125] Figure 17 ~ Figure 18 The third embodiment of the optical inner surface measuring device of the present invention is shown.

[0126] Figure 17 It is a cross-sectional view of an optical inner surface measuring device according to an embodiment of the present invention. The fixed-side optical fiber 1 that transmits light between the tip side (the direction side of the light-transmitting member 21) and the rear side of the probe 59 is built in the tube 36, and the tip side of the fixed-side optical fiber 1 is provided with, for example, a spherical lens. Condenser lens 24.

[0127] On the tip side of the condenser lens 24, there is a first optical path conversion mechanism 33 composed of a rotating mirror with an inclination angle or the like, and is rotated by the first motor 12 by applying a voltage from the wire 23.

[0128] The first motor 12 incorporates a motor coil 7 inside a slidable motor case 8 supported by a sliding guide 20 fixed on the inner peripheral surface o...

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PUM

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Abstract

The optical type inner surface measurement device enables a probe to go into an inner circumference surface or a deep hole inner diameter of a measured object, stereoscopically takes in a light ray reflected from the inner surface and measures accuracy, and the optical type inner surface measurement device can perform higher accuracy measurement. The optical type inner surface measurement device has an optical fiber arranged inside a tube, an optical path conversion mechanism arranged in a front end side of the optical fiber, a motor enabling the optical path conversion mechanism to perform rotation driving and a mechanism for measuring a vibration quantity of a motor rotation shaft. A computer can calculate reflection light of a detected object to obtain shape data of an inner circumference surface of a detected object through displacement data correction of a displacement measurement mechanism; a measurement error caused by vibration or rotation vibration of a rotation shaft of the motor is eliminated; and thus high accuracy measurement can be performed.

Description

Technical field [0001] The present invention relates to a method for making a probe enter the inner peripheral surface or the inner diameter of a deep hole of an object to be inspected and radiating light to the inner surface or the bottom surface of the deep hole, taking the reflected light three-dimensionally for observation, and measuring the size and geometric accuracy Optical inner surface measuring device. Background technique [0002] For example, the finished size and geometric accuracy of the cylinder of an automobile engine greatly affect the power performance and fuel consumption efficiency of the automobile, but their inspection usually uses a roundness measuring machine, a surface roughness meter, and a linearity measuring machine. It can be inspected by contact measuring machine such as the length gauge of the ruler. However, in recent years, for the purpose of not damaging the object to be measured, optical non-contact measuring machines have appeared. [0003] As ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01B11/12G01B11/24
Inventor 山崎大志福岛绘理柳浦一美浅田隆文
Owner NAMIKI PRECISION JEWEL CO LTD