Contour etching method and device
A profile and etching technology, applied in the field of industrial manufacturing, can solve problems such as different expected etching results
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[0101] The first embodiment of the present invention discloses a profile etching method. see image 3 As shown in the workflow diagram, the method includes:
[0102] Step S11, obtaining the contour type of each contour segment included in the pattern to be etched, wherein the contour type includes: a straight line segment, an arc segment and a circle.
[0103] The pattern to be etched is usually composed of one or more types of contour segments. Therefore, in the embodiment of the present invention, it is necessary to classify the contour types of each contour segment.
[0104] Step S12 , according to the size parameters of each contour segment, obtain an empirical etching amount, and determine the aperture radius r of the etching aperture as the empirical etching amount.
[0105] In the embodiment of the present invention, the corresponding relationship between each size parameter and the empirical etching amount is usually stored in advance. In this case, after obtaining t...
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