Flexible terahertz metamaterial wave absorber and manufacturing method thereof

A manufacturing method and wave absorber technology, applied in the terahertz field, can solve the problems of metamaterial redesign, cumbersome preparation process, and differences in process parameters, and achieve the effects of reducing the number of photolithography times, simplifying the manufacturing method, and reducing costs

Inactive Publication Date: 2017-01-11
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Moreover, the preparation of terahertz metamaterials is usually through traditional steps such as photolithography, and the process par...

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  • Flexible terahertz metamaterial wave absorber and manufacturing method thereof
  • Flexible terahertz metamaterial wave absorber and manufacturing method thereof
  • Flexible terahertz metamaterial wave absorber and manufacturing method thereof

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Embodiment Construction

[0042] In order to make the object, technical solution and advantages of the present invention clearer, preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0043] figure 1 It is a schematic diagram of the flexible terahertz metamaterial wave absorber of the present embodiment; figure 2 It is the physical picture of the flexible terahertz metamaterial wave absorber of this embodiment, a is an optical microscope photo, and b is a photo when it is bent; as shown in the figure, the wave absorber includes a layer of patterned Metal film 1, one layer of flexible dielectric film 2 and one layer of continuous metal film 3; the metal figure of the patterned metal film presents a square periodic structure figure, P is the square unit periodic side length of 72 μm, and a is The side length of the square shape is 52 μm.

[0044] Such as image 3 As shown, the manufacturing method of the flexible terahertz meta...

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Abstract

The invention discloses a flexible terahertz metamaterial wave absorber and a manufacturing method thereof. The wave absorber comprises a layer of patterned metal thin film, a layer of flexible dielectric thin film and a layer of continuous metal thin film sequentially from top to bottom. The wave absorber manufacturing method comprises steps: the layer of continuous metal thin film is deposited on one surface of the flexible dielectric thin film; the patterned masking thin film covers the other surface of the flexible dielectric thin film, the other layer of metal thin film is deposited on the surface, the masking thin film and the flexible dielectric thin film are separated, and the patterned metal thin film with a complementary pattern with the masking thin film is obtained on the other surface of the flexible dielectric thin film. The flexible terahertz metamaterial wave absorber has the advantages of being flexible and retractable; the flexible terahertz metamaterial wave absorber can be bent through applying an external force, and the absorbing coefficient is thus changed; the terahertz response performance can be adjusted conveniently; the manufacturing method is simple; and the manufactured masking thin film can be used repeatedly for multiple times.

Description

technical field [0001] The invention belongs to the technical field of terahertz, and relates to a flexible terahertz metamaterial wave absorber and a manufacturing method thereof. Background technique [0002] Terahertz wave (THz), usually refers to electromagnetic waves with a frequency of 0.1-10THz, has some unique physical characteristics, such as high permeability, so it can be applied in the field of non-destructive testing in the process of security inspection or quality inspection; low energy, will not cause Photoionization destroys the substance to be tested, which is very suitable for biopsy of human body or other biological samples; fingerprint spectrum, so terahertz spectral imaging technology can distinguish the shape of the object, identify the components of the object, and analyze the composition of the object. Physical and chemical properties. It is precisely because of the unique advantages of terahertz waves that they have gradually become an international...

Claims

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Application Information

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IPC IPC(8): H01Q15/00H01Q17/00
CPCH01Q15/0086H01Q17/00
Inventor 许向东陈哲耕戴泽林蒋亚东孙铭徽谷雨范凯李欣荣王福连宇翔
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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