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Detection device and method for measuring transmitted wavefront of long focal length lens by computational holography

A long focal length lens and detection method technology, applied in the field of optical measurement, can solve the problems of reduced detection accuracy, complex adjustment, long optical path, etc., and achieve the effect of shortening the detection optical path, improving detection accuracy, and high detection accuracy

Active Publication Date: 2018-10-09
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] When the above method is used for measurement, the optical path is more complicated, and the adjustment during measurement is complicated; for the wavefront detection of long focal length lenses, the measurement optical path of this method is longer, and disturbances such as vibration and air flow will reduce the detection accuracy; for large aperture lenses For detection, the size of the spherical mirror also needs to be large, and factors such as processing accuracy and clamping of high-precision spherical mirrors will affect the detection accuracy

Method used

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  • Detection device and method for measuring transmitted wavefront of long focal length lens by computational holography
  • Detection device and method for measuring transmitted wavefront of long focal length lens by computational holography
  • Detection device and method for measuring transmitted wavefront of long focal length lens by computational holography

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Effect test

Embodiment 1

[0070] The wavelength λ=632.8nm of the collimated parallel light output by the interferometer, the size of the measured long focal length lens is Φ80mm, the focal length of the measured long focal length lens is f=1.5m, the aperture is Φ70mm, and the first Fresnel zone plate The first-order diffraction curvature radius R=1.2m, the size is Φ80mm, the distance between the Fresnel zone plate and the measured long focal length lens τ=0.3m, the distance between the measured long focal length lens and the standard plane mirror of the interferometer is about 0.3m, The total detection optical path length is about 0.6m. The test results are attached Figure 4 shown.

Embodiment 2

[0072]The wavelength of the collimated parallel light output by the interferometer is λ=632.8nm, the size of the measured long focal length lens is Φ430mm, the focal length of the measured long focal length lens is f=31.25m, the aperture is Φ420mm, and the first Fresnel zone plate The first-order diffraction curvature radius R=30.75m, the size is Φ430mm, the distance between the Fresnel zone plate and the measured long focal length lens τ=0.5m, the distance between the measured long focal length lens and the standard plane mirror of the interferometer is about 0.4m, The total detection optical path length is about 0.9m. The test results are attached Figure 5 shown.

Embodiment 3

[0074] The wavelength λ=632.8nm of the collimated parallel light output by the interferometer, the size of the measured long focal length lens is Φ430mm, the focal length of the measured long focal length lens is f=13.5m, the aperture of the light is Φ420mm, and the first Fresnel zone plate The first-order diffraction curvature radius R=13mm, the size is Φ430mm, the distance between the Fresnel zone plate and the measured long focal length lens τ=0.5m, the distance between the measured long focal length lens and the standard plane mirror of the interferometer is about 0.4m , the total detection optical path length is about 0.9m. The test results are attached Figure 6 shown.

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Abstract

The invention discloses a detection device and detection method for measuring long-focal-length lens transmission wavefront by a computer-generated holography, and belongs to the technical field of optical measurement. The detection device is mainly characterized in that an interferometer, a measured long-focal-length lens and a Fresnel wave zone plate form a Fizeau interference optical path; when collimated parallel light output by the interferometer passes through a standard plane mirror, one beam is reflected by a reference surface of the standard plane mirror to form a standard reference light beam; the other beam penetrates through the measured long-focal-length lens to be transmitted and is reflected through the wave zone plate to return along the original path for forming a test light beam; the test light beam and the standard reference light beam generate interference; the tested long-focal-length lens is regulated, so that interferometric fringes are minimum; the transmission wavefront of the tested long focal-length lens can be obtained through measurement. The method and the device provided by the invention are applicable to the detection of the long-focal-length lens transmission wavefront.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and relates to a detection device and a detection method of a lens transmission wavefront, in particular to a transmission wavefront detection device and a detection method of a long focal length lens. Background technique [0002] With the development of aviation, aerospace, astronomy and high-power laser fields, the requirements for the quality and precision of the optical system have been increased. In order to ensure the imaging quality of the optical system, it is becoming more and more important to accurately measure the transmitted wavefront of the optical lens. Large aperture and long focal length lenses are widely used in national large-scale optical devices such as inertial confinement fusion and astronomical detection systems. The transmitted wavefront is an important indicator of this type of component, and the mismatch between the transmitted wavefront and the design will...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02
CPCG01M11/02G01M11/0207G01M11/0235
Inventor 魏小红何宇航柴立群高波徐凯源李强刘昂
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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