High voltage mems, and a portable ultrasound device comprising such a mems
An ultrasonic device, portable technology, used in other nursing equipment, ultrasonic/sonic/infrasonic diagnosis, circuits, etc.
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[0042] The invention relates in a first aspect to a high voltage MEMS as claimed in claim 13 .
[0043] Microelectromechanical systems (MEMS) involves the technology of very small devices; it includes nanoscale nanoelectromechanical systems (NEMS) and nanotechnology. MEMS is also known as micromachine or microsystem technology. Typically, MEMS are composed of components ranging in size from 1 micron to 5000 microns (ie, 0.001 mm to 5 mm), and MEMS devices typically range in size from 20 microns to one millimeter. They usually consist of a central unit (microprocessor) that processes data and several components (such as microsensors) that interact with the surroundings.
[0044] Piezoelectricity involves, in one aspect, the accumulation of charge in certain solid materials in response to applied mechanical stress. The word piezoelectric refers to electricity generated by pressure. The piezoelectric effect in its optimal form may involve a linear electromechanical interaction...
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