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Problems solved by technology
Damage to such movable members and stoppers may result in impaired functionality of the MEMS device
Method used
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no. 1 approach
[0037] figure 1 The MEMS device includes: a fixed member 1 and a movable member 3 supported vibratingly in the X-Y direction by an elastic body 2 .
[0038] One end of the fixing member 1 and the elastic body 2 is fixed to a base (pedestal) such as a substrate (not shown). The movable member 3 and the base are supported by the elastic body 2 through a gap.
[0039] The movable member 3 resists the elastic force of the elastic body 2 and moves in the X direction, thereby colliding with the fixed member 1 in the X direction. At collidable portions of the fixed member 1 and the movable member 3, an impact mitigation mechanism 4 is provided.
[0040] The fixed member 1, the elastic body 2, and the movable member 3 can be formed of silicon material, for example.
[0041] The average thickness of the fixing member 1 , the elastic body 2 and the movable member 3 in the Z direction (the depth direction of the paper) perpendicular to the X-Y direction can be, for example, 10 μm or m...
no. 2 approach
[0068] Figure 5 The shock mitigation mechanism 4a can replace the figure 2 The shock mitigation mechanism 4 is suitable for figure 1 MEMS devices.
[0069] Figure 5 The impact mitigation mechanism 4a has: a strip-shaped stopper portion 5a that is protrudingly provided on the fixing member 1 in a direction (Y direction) substantially perpendicular to the collision direction (X direction) and fixed on one side; The protrusion 6 is protrudingly provided on the movable member 3 in the collision direction (X direction). Figure 5 The structure of the protrusion 6 of the impact mitigation mechanism 4a and figure 2 The shapes and the like of the protrusions 6 of the shock absorbing mechanism 4 are the same, so repeated descriptions are omitted.
[0070] (stop part)
[0071] The stopper portion 5a is formed in a strip shape extending in the Z direction perpendicular to the X-Y direction, and one side in the Y direction is fixed to the fixing member 1, and the other side is n...
no. 3 approach
[0075] Figure 6 The shock mitigation mechanism 4b can be replaced by figure 2 The shock mitigation mechanism 4 is suitable for figure 1 MEMS devices.
[0076] Figure 6 The impact mitigation mechanism 4b has: a strip-shaped stopper 5b protrudingly provided on the fixing member 1 in a direction (Y direction) substantially perpendicular to the collision direction (X direction) and having both sides fixed; The protrusion 6 is protrudingly provided on the movable member 3 in the collision direction (X direction). Figure 6 The structure of the protrusion 6 of the impact mitigation mechanism 4b and figure 2 The shapes and the like of the protrusions 6 of the shock absorbing mechanism 4 are the same, so repeated descriptions are omitted.
[0077] (stop part)
[0078] The stopper portion 5b is formed in a strip shape extending in the Z direction perpendicular to the X-Y direction, and both sides in the Y direction are fixed to the fixing member 1 . That is, both sides of th...
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Abstract
A MEMS device, which is provided with a stationary member (1) and a movable member (3) supported so as to allow oscillation via an elastic body (2), is equipped with a collision-damping mechanism provided on the portions of the movable member and the stationary member that can collide. Said collision-damping mechanism has: a band-shaped stopper that protrudes roughly perpendicular to the collision direction on either the stationary member or the movable member and at least one side edge of which is fixed; and a protruding strip that protrudes from the other of the stationary member and the movable member or from the stopper in the collision direction. The protruding strip and the stopper are configured so that the greater the collision force between the movable member and the stationary member, the more the position of the surfaces in the region of contact approaches the fixed side edge of the stopper. The present invention makes it possible to provide a MEMS device that can limit stiction and that is not easily damaged.
Description
[0001] [technical field] [0002] The invention relates to a MEMS device. [0003] [Background technique] [0004] In recent years, devices (MEMS devices) with tiny mechanical elements formed using semiconductormanufacturing technology called MEMS (Micro Electro Mechanical Systems) are being developed, for example, as gyro sensors and acceleration sensors. be realized. [0005] Many of the above-mentioned MEMS devices include a movable member vibratingly supported by a substrate via an elastic body. It is known that in a MEMS device including a movable member, a phenomenon called stiction occurs in which the movable member adheres to other members due to the capillary force (meniscus force) of the liquid used in the manufacturing process. [0006] In order to effectively prevent such sticking, the contact area of the movable member and other members may be reduced. For this purpose, for example, there is provided a method of providing a small protrusion-shaped stopper tha...
Claims
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