Single-bridge magnetic field sensor
A magnetic field sensor, single-electrical technology, applied in instruments, measuring magnetic variables, measuring devices, etc., can solve the problems of magnetic field vector intensity errors, not located on the same horizontal reference plane, and different magnetic field intensity measurement ranges.
Inactive Publication Date: 2017-03-08
张 庆瑞 +5
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Problems solved by technology
Although there are a variety of vector magnetic field sensor technologies, the measurement ranges of the magnetic field strength of various devices are different. For example, the Hall sensor is suitable for measuring the magnetic field from 10μT to 1T, while the magnetoresistive sensor can measure the magnetic field from 1mT to 0.1μT, so Different magnetic field ranges require different types of vector sensors
In addition, in the current vector sensor design, the three component sensors are independent and have different positions. In addition, each component sensor is composed of a bridge unit. Therefore, the configuration of the three component sensors makes the volume of the whole device larger, and The measured magnetic field components are not located on the same horizontal reference plane, thus causing numerical errors in the magnetic field vector strength; there is still a need for continuous improvement and development of vector magnetic field sensors
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[0023] The structure, features and embodiments of the present invention are described below with the assistance of drawings, so that examiners can have a better understanding of the present invention.
[0024] Such as figure 1 As shown, the present invention relates to a single-bridge magnetic field sensor, and the single-bridge magnetic field sensor A includes:
[0025] a substrate 1;
[0026] Such as figure 1 As shown, the substrate 1 is preferably a substrate capable of manufacturing a magnetoresistive sensing element, such as but not limited to a silicon substrate.
[0027] a flux guide 2;
[0028] Such as figure 2 As shown, the fluxguide 2 is a square prism and is directly or indirectly arranged on the surface of the substrate 1. The material of the fluxguide 2 is preferably high magnetic permeability and low hysteresis High rate soft magnetic materials, such as nickel zinc ferrite soft magnetic material (Ni-Zn ferrite) or nickel-iron alloy (Ni-Fe). Such as image...
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The invention discloses a single-bridge magnetic field sensor. Circuit switching is performed mainly through first to fourth magnetic resistance components contained in a bridge unit and a switching circuit according to the direction of a magnetic field to be measured, and thus, the electrical connection relationships of the magnetic resistance components, input voltage sources, grounding ends and voltage output ends is changed, and the measured value of the magnetic field in each axial direction is obtained according to the magnetic resistance values of the magnetic resistance components and the output voltage values of the voltage output ends. The axial magnetic fields can be measured by use of a single bridge unit. Therefore, compared with the technical scheme in which the existing magnetic field sensor uses at least three bridge units, the overall size of the single-bridge magnetic field sensor provided by the invention can be reduced drastically.
Description
technical field [0001] The invention relates to an instrument for measuring magnetic field, in particular to a single bridge magnetic field sensor. Background technique [0002] Magnetic field sensors measure the magnetic field vector in space, but indicating the direction of the magnetic field requires measuring three mutually orthogonal magnetic field components at the same location. Although there are a variety of vector magnetic field sensor technologies, the measurement ranges of the magnetic field strength of various devices are different. For example, the Hall sensor is suitable for measuring the magnetic field from 10μT to 1T, while the magnetoresistive sensor can measure the magnetic field from 1mT to 0.1μT, so Different magnetic field ranges require different types of vector sensors. In addition, in the current vector sensor design, the three component sensors are independent and have different positions. In addition, each component sensor is composed of a bridge ...
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IPC IPC(8): G01R33/09
Inventor 张庆瑞郑振宗许仁华吕志诚赖柏霖梁文史
Owner 张 庆瑞