Ultraviolet systems and methods for irradiating substrates
A substrate, irradiation technology, applied in the field of ultraviolet systems, which can solve the problems of increased cost and expensive downtime
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[0021] figure 1 A schematic diagram of an exemplary UV system 10 for irradiating a substrate is provided. The UV system 10 includes one or more solid-state RF sources 12 capable of generating RF energy. As an example, a suitable solid state RF source 12 may be Panasonic part number SSMM-200-A01. In some embodiments, solid state RF source 12 includes multiple solid state RF generating devices connected together using a combiner. In some embodiments, solid state RF source 12 is placed in a Faraday cage 14 .
[0022] The UV system 10 also includes a lamp head 16 having an interior. The solid state RF source 12 located outside the interior of the lamp head 16 is coupled by one or more cables 20 to one or more antennas 18 located within the interior of the lamp head 16 . Preferably, a plurality of antennas are located within the interior of the lamp head 16 . Cable 20 may comprise any type of propagation medium suitable for delivering RF energy generated by solid-state RF sour...
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