Transmission connecting structure for magnet motor and belt pulley

Abstract

The invention provides a transmission connecting structure for a magnet motor and a belt pulley. An intercalation structure which is coaxial with a central shaft, is positioned at the periphery of an extending section and is opened in the top-end plane of the extending section, is arranged on the central shaft extending section of the magnet motor; the belt pulley is ring-shaped, and tightly surrounds the periphery of the top end of the extending section; an intercalation structure which penetrates through the belt pulley is arranged on a position, which corresponds to the intercalation structure of the extending section, of the inner side surface of the belt pulley; one fixed part is inserted into a complete intercalation structure jointed by the extending section and the belt pulley, so that the fixed part, the extending section and the belt pulley are integrally connected; and the central shaft extending section, the belt pulley and the fixed part are connected through a circlip. According to the transmission connecting structure disclosed by the invention, the circlip is used for connecting and fixing a magnet motor center shaft, a fixed key and the belt pulley, so that power is guaranteed to be transmitted to the magnet motor; meanwhile, the fixed key is in tight contact with the central shaft, so that transmission failure caused by transmission efficiency reduction or loosening of the fixed key is avoided, normal uniform-speed rotation of the magnet motor is kept, and the final purpose of providing stable magnetic fields needed for a PVD process is finally achieved.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a connection structure between a magnet motor and a pulley drive. Background technique [0002] In the manufacture of integrated circuits, the deposition of metal films on the surface of silicon wafers by physical vapor deposition PVD is a common process: generally in the PVD chamber, through the joint action of voltage, large current and magnetic field, ionized inert gas ions are used to The target is bombarded, causing the target to be ejected in the form of ions, atoms or molecules and deposited on the surface of the substrate to form a thin film. In the PVD equipment chamber for depositing tantalum nitride, the Magnet Motor rotates on the surface of the target Target at a speed of 60 per minute to form a surface magnetic field, and the inert gas is ionized by a strong direct current to form plasma. Under the acceleration of the magnetic field, it hits the surf...

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to avoid transmission efficiency reduction caused by wear and tear of the fixed key due to long-term operation or loss of transmission caused by the loosening of the fixed key Key, so as to maintain the normal and uniform rotation of the Magnet Motor and provide PVD technology The final purpose of the desired stable magnetic field

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