Grinding disc with internal flow supply structure

Abstract

The present invention discloses a grinding disc with an internal flow supply structure, and the grinding disc is installed on a drive shaft with a plurality of feed lines and comprises a multi-porous grinding layer and a base. The multi-porous grinding layer comprises a bonding surface and a grinding surface, which are opposite to each other. The base is joined to the bonding surface, and comprises a plurality of channels passing through the base, wherein the channels are arranged in a concentric or radial form and at least a portion of the channels extend to an edge of the bonding surface. Each channel is used for disposing the liquid supply line. Therefore, the grinding disc can adjust the amount of fluid outlet at different positions of the polishing surface of the multi-porous abrasive layer by controlling the supply of the fluid in each channel or the flow rate so as to adjust the amount of consumption in different positions, by effectively reducing the deformation of the grinding surface to reduce the number of dressings.

Description

technical field [0001] The present invention relates to an abrasive disc with an internal fluid supply structure. Background technique [0002] Grinding is a processing technology that uses a grinding disc to contact and rub the surface of a workpiece to remove the material of the workpiece and make the surface of the workpiece smooth. For example, in the semiconductor manufacturing process, after the semiconductor substrate is cut by a wire saw, the surface of the substrate is ground by the grinding disc , to remove the cut and establish a datum. In the process of the grinding disc contacting and rubbing the surface of the workpiece, chips and high temperature will be generated. Therefore, during the grinding process, the cutting fluid is provided to the contact position between the grinding disc and the workpiece surface, so that the cutting fluid can take away the chips and achieve the effect of cooling. [0003] Some disc structures are disclosed in the prior art, for e...

AI Technical Summary

Problems solved by technology

[0008] The object of the present invention is to disclose a grinding disc with an internal fluid supply structure, the fluid can be directly supplied between the grinding surface and the workpiece through the porous grinding layer, and the fluid outlet volume at different positions of the grinding surface can be adjusted, thereby solving the problem In the existing technology, since the consumption of each part of the grinding surface of the grinding disc cannot be controlled, the grinding surface needs to be regularly trimmed to ensure its flatness

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