A method for measuring the thermal expansion coefficient of hydrogen-containing diamond-like coatings at low temperatures
A technology of thermal expansion coefficient and diamond coating, which is applied in the direction of thermal expansion coefficient of materials, can solve the problem that hydrogen-containing diamond-like carbon cannot be obtained
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[0027] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0028] The embodiment of the present invention provides a method for measuring the thermal expansion coefficient of the hydrogen-containing diamond-like coating at low temperature, comprising the following steps:
[0029] (1) Prepare a-C:H coating samples with two different materials as substrates, and obtain A sample and B sample respectively;
[0030] (2) At temperature T 0 Next, measure the radius of curvature R of the A sample and the B sample with a strain gauge A0 and R B0 ;
[0031] (3) Raise the temperature of the sample to T by the temperature control ...
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