Absolute type capacitor angle displacement measurement sensor
A displacement measurement and capacitance angle technology, which is used in converting sensor output, using electromagnetic/magnetic devices to transmit sensor components, measuring devices, etc. question
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Embodiment 1
[0063] Such as figure 1 As shown, the absolute capacitive angular displacement measurement sensor of the present invention includes a sensitive structure 1 , a signal modulation and demodulation circuit 2 and an error compensation and fusion module 3 .
[0064] Such as figure 2 As shown, the sensitive structure 1 includes a first stator 11, a rotor 12 and a second stator 13, and the ring-shaped first stator 11, the ring-shaped rotor 12 and the ring-shaped second stator 13 have the same shape and size and are arranged longitudinally and parallel in sequence.
[0065] Such as image 3 As shown, the first stator 11 includes a precise measurement collection electrode 111, a precise measurement excitation electrode 112 and a first charge amplifier (not shown in the figure); the first charge amplifier is fixedly arranged at the bottom of the first stator 11, and the first stator The ring-shaped precision measurement collection electrode 111 is arranged on the outside of the top o...
Embodiment 2
[0124] The structure of this embodiment is basically the same as that of Embodiment 1, the difference is that in this embodiment, the three-piece ring-shaped first stator 11, ring-shaped rotor 12 and ring-shaped second stator 13 of the same size in Embodiment 1 are replaced by a double-piece type An annular stator 14 and an annular rotor 15 of the same size, such as Figures 14 to 17 As shown, the stator 14 and the rotor 15 are arranged in parallel and at intervals. The stator 14 includes fine measurement collecting electrodes 141, excitation electrodes 142, rough measurement collecting electrodes 143 and charge amplifiers (not shown in the figure), and the rotor 15 includes fine measurement sensitive electrodes 151, Coupling electrodes 152 and coarse measurement sensitive electrodes 153; the bottom of the stator 14 is fixedly provided with a charge amplifier, and the top of the stator 14 is sequentially provided with ring-shaped precise measurement collection electrodes 141, r...
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