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Tubular large-volume plasma polymerized coating device

A plasma and coating device technology, applied in the field of plasma, can solve the problems of poor batch processing uniformity, small batch, high cost, etc., and achieve the effect of large batch processing, low cost, and reduced processing cost

Inactive Publication Date: 2017-05-31
JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a tubular large-volume plasma polymerization coating device to solve the problems of small volume, small batch, low efficiency, high cost, and poor uniformity of batch processing in the prior art

Method used

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  • Tubular large-volume plasma polymerized coating device

Examples

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Comparison scheme
Effect test

Embodiment 1

[0019] Such as figure 1 Shown, a kind of tubular large-volume plasma polymerization coating device, vacuum chamber 1 is tubular, and the inner diameter of vacuum chamber 1 is 30cm, and length is 10m, and electrode 2 and guide rail 3 are installed on the inner wall of vacuum chamber 1, described The gap between the electrode 2 and the inner wall of the vacuum chamber 1 is 10 mm. The electrode 2 is cylindrical and located on the cylindrical surface coaxial with the vacuum chamber 1. The electrode 2 is divided into left and right parts, leaving a gap in the middle to install the guide rail 3 , the electrode 2 is not in contact with the guide rail 3, the electrode is covered with through holes, the aperture is 2mm, the hole interval is 2mm, the material of the electrode is aluminum or stainless steel; the jig 4 is installed on the guide rail 3, and the vacuum chamber 1 Shaft, the base material 5 to be treated is installed in the jig 4, the jig 4 is a cylindrical cage made of metal...

Embodiment 2

[0021] A tubular large-volume plasma polymerization coating device, the vacuum chamber 1 is tubular, the inner diameter of the vacuum chamber 1 is 80cm, and the length is 0.5m. Electrodes 2 and guide rails 3 are installed on the inner wall of the vacuum chamber 1. The electrodes 2 The gap between it and the inner wall of the vacuum chamber 1 is 60mm, wherein the electrode 2 is cylindrical and is located on the cylindrical surface coaxial with the vacuum chamber 1. The electrode 2 is divided into three parts, and the gap left is installed with the guide rail 3. The electrode 2 and the The guide rail 3 is not in contact, the electrodes are covered with through holes, the aperture is 30 mm, the hole interval is 30 mm, and the material of the electrodes is aluminum or stainless steel; the jig 4 is installed on the guide rail 3, coaxial with the vacuum chamber 1, to be processed The base material 5 is installed in the jig 4, and the jig 4 is a cylindrical cage made of metal or plast...

Embodiment 3

[0023] A tubular large-volume plasma polymerization coating device, the vacuum chamber 1 is tubular, the inner diameter of the vacuum chamber 1 is 50cm, and the length is 5m. Electrodes 2 and guide rails 3 are installed on the inner wall of the vacuum chamber 1. The electrodes 2 and The gap between the inner walls of the vacuum chamber 1 is 30mm. The electrode 2 is cylindrical and located on the cylindrical surface coaxial with the vacuum chamber 1. The electrode 2 is divided into six parts, leaving a gap in the middle to install the guide rail 3. The electrode 2 and the The guide rail 3 is not in contact, the electrodes are covered with through holes, the aperture is 15 mm, the hole interval is 15 mm, and the material of the electrodes is aluminum or stainless steel; the jig 4 is installed on the guide rail 3, coaxial with the vacuum chamber 1, to be processed The base material 5 is installed in the jig 4, and the jig 4 is a cylindrical cage made of metal or plastic, and the t...

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Abstract

The invention provides a tubular large-volume plasma polymerized coating device and belongs to the technical field of plasma. The tubular large-volume plasma polymerized coating device is used for preparing a polymer coating on the surface of a base material, and is characterized in that a vacuum chamber is tubular, an electrode and guide rails are mounted on the inner wall of the vacuum chamber, the electrode takes the shape of a cylindrical surface, is positioned on a cylindrical surface coaxial with the vacuum chamber and is divided into at least two parts, the guide rails are mounted in reserved gaps, the electrode is not in contact with the guide rails, jigs are mounted on the guide rails and are coaxial with the vacuum chamber, the base material to be treated is mounted in the jigs, carrier gas pipelines and single steam pipelines are arranged at the top of the vacuum chamber at intervals in the axial direction, vacuum exhaust pipelines are arranged at the bottom of the vacuum chamber at intervals in the axial direction, and vacuum chamber doors are mounted at two ends of the vacuum chamber to allow the jigs to be fed in and taken out. According to the tubular large-volume plasma polymerized coating device, the volume of the vacuum chamber is large, the plasma uniformity is favorable, the treatment batch is large, the efficiency is high, the cost is low, and the quality uniformity of products treated in batch is excellent.

Description

technical field [0001] The invention belongs to the field of plasma technology and relates to a plasma polymerization coating device. Background technique [0002] Plasma polymerized coating is an important surface treatment method. In the plasma polymerization coating process, the substrate to be treated is placed in a vacuum chamber, the process gas and gaseous organic monomers are introduced into the vacuum state, and the organic gaseous monomers are plasmaized by discharge to generate All kinds of active species, polymers are formed by addition reactions between these active species or between active species and monomers. In the industrial application of plasma polymerized coatings, in order to increase the processing batch and reduce the processing cost as much as possible, it is necessary to increase the volume of the vacuum chamber as much as possible so as to accommodate more substrates for processing at the same time. However, the plasma polymerization coating dev...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05B5/08B05B15/12
CPCC23C16/50B05B5/08B05B16/40B05D1/62
Inventor 宗坚
Owner JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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