Precision lead screw driven annular gas hydrostatic guideway

Abstract

The invention discloses a precision lead screw driven annular gas hydrostatic guideway which comprises a gas hydrostatic guideway strip, gas hydrostatic guideway slide carriages respectively arranged on the upper portion and two sides of the gas hydrostatic guideway strip, a gas hydrostatic guideway lower slide carriage on the lower portion, a precision lead screw transmission device arranged on the gas hydrostatic guideway strip and a transmission support connected on the gas hydrostatic guideway slide carriages on the two sides. The precision lead screw transmission device comprises a precision lead screw driven by a servo motor, a precision lead screw nut matched with the precision lead screw and a lead screw nut connecting seat fixedly arranged on the precision lead screw nut; the precision lead screw is arranged parallel to the annular gas hydrostatic guideway, and the lead screw nut connecting seat is arranged perpendicular to the precision lead screw upwards; two spherical jacking blocks are fixed at the upper end of the transmission support, spherical surfaces of the spherical jacking blocks are opposite to each other and form bidirectional point contact with the lead screw nut connecting seat along the movement direction of the guideway, and a servo motor seat and a bearing seat connected at two ends of the precision lead screw are respectively fixed on the gas hydrostatic guideway strip.

Description

technical field [0001] The invention belongs to the field of ultra-precision manufacturing equipment, and relates to an ultra-precision milling and polishing machine tool in the processing of optical elements, in particular to a precision screw-driven annular gas static pressure guide rail. Background technique [0002] Manufacturing is the pillar industry of the national economy, and ultra-precision machining technology is the most important traction for the development of manufacturing. Ultra-precision milling and grinding are an important part of ultra-precision machining technology. Gas static pressure guide rail pair is one of the core components to ensure machining accuracy in ultra-precision machining machine tools. It requires high precision, high stability, and economy. . [0003] At present, the ultra-precision milling machine tools used in high-end optical processing technology mainly use ultra-precision gas static pressure guide rails to realize the milling feed...

AI Technical Summary

Problems solved by technology

The linear motor itself has the advantages of high speed, high sensitivity, and unlimited travel, but because the linear motor is extremely susceptible to end effects and load changes, it will cause system instability and performance degradation; and the use cost is high. Requires high-end CNC system and grating closed-loop control, which is expensive and limits the promotion and use of ultra-precision milling and grinding machines

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