Metal recovery device for production of germanium tetrachloride
A germanium tetrachloride and a recovery device technology, applied in the semiconductor field, can solve problems such as inability to remove metal impurities well, and achieve the effects of high recovery efficiency and simple operation
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
specific Embodiment
[0017] to combine figure 1 A kind of metal recovery device for the production of germanium tetrachloride shown comprises a reaction chamber 1, a condensation chamber 7 and a recovery chamber 10, the top of the reaction chamber 1 is provided with an exhaust pipe 6, and the bottom of the reaction chamber 1 is provided with a liquid outlet pipe 2, The exhaust pipe 6 is connected to the condensation chamber 7, the liquid outlet pipe 2 is connected to the recovery chamber 10, and the condensation chamber 7 is connected to the recovery chamber 10. The first adsorption column 3 and the second adsorption column 4 are arranged in the recovery chamber 10, and the first adsorption column 3 and the second adsorption column 4 are arranged in the recovery chamber 10. The column 3 is wound with a first feed pipe 5, and the second adsorption column 4 is wound with a second feed pipe 11. One end of the first feed pipe 5 is connected to the condensation chamber 7 through the first connecting pip...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 
