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A system and method for high-resolution and high-efficiency measurement of six geometric errors of linear guide rails

A measurement system and geometric error technology, which is applied in the field of high-resolution and high-efficiency measurement systems for six-item geometric errors of linear guide rails, and can solve problems such as low measurement efficiency

Active Publication Date: 2019-06-07
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Laser interferometer, as a traditional linear guide rail accuracy verification device, has the advantage of high precision. However, for the measurement of six geometric errors of guide rail, laser interferometer cannot avoid the disadvantage of low measurement efficiency.

Method used

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  • A system and method for high-resolution and high-efficiency measurement of six geometric errors of linear guide rails
  • A system and method for high-resolution and high-efficiency measurement of six geometric errors of linear guide rails
  • A system and method for high-resolution and high-efficiency measurement of six geometric errors of linear guide rails

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Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0026] Such as figure 2As shown, when the circularly polarized light emitted by the laser (1) passes through the first polarizing beam splitter (2), the S light is irradiated as a reference beam after being reflected by the first corner cube (3) and the first plane mirror (9) onto the photoelectric receiver (10). The P light as the measuring light beam is transmitted through the first polarizing beam splitter (2) and the second polarizing beam splitter (5), and then enters the second polarizing beam splitter (6). The P light is transmitted through the second polarization beam splitter (6) again, and becomes circularly polarized light after passing through the first quarter-wave plate (8), after the reflection of the circularly polarized light through the fifth corner cube prism (29), into circularly polarized light of opposite hand. The circularly polarized light becomes S light again after passing through the first quarter-wave plate (8). After the S light is reflected by...

Embodiment approach 2

[0029] Such as image 3 As shown, after the reflection of the fifth corner cube prism (29), and the P light transmitted through the first quarter-wave plate (8), after being transmitted through the second polarizing beam splitter (6), it passes through the first beam splitter Mirror (4) and rectangular prism reflector (11) after the reflection, shines on the photosensitive surface of the first four-quadrant detector (12), makes it produce position signal. According to the polarization characteristics of light, the measurement beam passes through the first quarter-wave plate (8) four times, so during the measurement process, the linear guide rail motion platform (31) produces a straightness error δ in the y and z directions 2 Can make the light spot on the first quadrant detector (12) produce 4δ 2 offset. That is, the straightness error δ 2 with the readings of the first four-quadrant detector (12) d 2 The relationship is as follows:

[0030]

Embodiment approach 3

[0032] Such as Figure 4 As shown, the P light transmitted through the first polarizing beam splitter (2) is transmitted through the second quarter-wave plate (14) after being reflected by the second beam splitter (5) and the third corner cube (13). ), and become S light after the reflection of the fourth corner cube prism (15) and the transmission of the second quarter-wave plate (14). After this S light is reflected by the third dichroic mirror (16), it is transmitted through two first lenticular lenses (17), the second lenticular lens (18), and then irradiates on the second plane reflector (28), and is reflected Come back, after passing through the second lenticular lens (18) and the first lenticular lens (17) again, it is transmitted through the third dichroic mirror (16). After passing through the plano-convex lens (19), it is irradiated onto the second four-quadrant detector (20), so that it generates a position signal. According to the geometric properties of the firs...

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Abstract

The invention discloses a high-resolution high-efficiency measurement system and method for six geometric errors of a linear guide way. According to the system, a high-precision laser device and a photoelectric receiver are used as a reference to measure a positioning error of a linear guide way; and a four-quadrant detector is used for measuring a straightness error, a pitching error, a deflection error, and a rolling error of the linear guide way. In addition, according to the method, on the basis of a principle of optical path amplification, the resolution of measurement of all geometric errors of a linear guide way is improved. During the measurement process, only three measurement lenses are needed to be installed at a moving guide way; and all six geometric errors can be measured once by using the measurement method during the motion of the linear guide way. With the measurement method, the measurement resolution and efficiency for geometric errors of a guide way can be improved effectively.

Description

technical field [0001] The invention relates to the field of motion precision measurement of a guide rail, in particular to a high-resolution and efficient measurement system and method for six geometric errors of a linear guide rail. Background technique [0002] Linear guides are widely used in industrial manufacturing, precision measurement and other fields. The manufacturing accuracy, assembly accuracy and control accuracy of the guide rail will directly affect the motion accuracy of the guide rail. Laser interferometer, as a traditional linear guide rail accuracy verification device, has the advantage of high precision. However, for the measurement of six geometric errors of guide rail, laser interferometer cannot avoid the disadvantage of low measurement efficiency. A high-resolution and high-efficiency measurement system and method for six geometric errors of a linear guide rail can obtain six geometric errors after only one movement of the linear guide rail, which i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 石照耀宋辉旭陈洪芳
Owner BEIJING UNIV OF TECH