Quartz integrated resonance accelerometer

Abstract

A quartz integrated resonance accelerometer comprises a peripheral braced frame, the braced frame is connected with one ends of two flexible lever amplification mechanisms through a flexible hinge, the other ends of the two flexible lever amplification mechanisms are connected with a mass block through the flexible hinge, the two flexible lever amplification mechanisms are located at the sensitive direction SA of an accelerometer, the two flexible lever amplification mechanisms are respectively connected with one ends of two quartz vibrating beams, the other ends of the two quartz vibrating beams are connected with the braced frame, electrodes are distributed at the upper surfaces of the quartz vibrating beams, the quartz vibrating beams are respectively located in empty slots, the quartz integrated resonance accelerometer is centrosymmetric, the mass block inducts the accelerated speed, the force caused by the accelerometer is amplified through the flexible lever amplification mechanisms and is applied onto the quartz vibrating beams, frequencies on the two quartz vibrating beams are subtracted obtain a differential frequency, the differential frequency changing value is detected to obtain the size of the accelerometer. The quartz integrated resonance accelerometer can perform digital signal output and has high resolution ratio and good anti-disturbance performance, etc.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanical electronics (MEMS), and in particular relates to a quartz integrated resonant accelerometer. Background technique [0002] As an important part of the inertial navigation system, the accelerometer is used in flight control such as aviation, aerospace, navigation, and weapon stabilization and aiming systems such as smart shells, rockets, missiles, and unmanned military systems such as unmanned military aircraft and unmanned military submarines. The military industry and other fields have a wide range of application requirements. The internal processing of inertial navigation systems is generally digital signals. Therefore, with the vigorous development of navigation and guidance systems in commercial and national defense fields, resonant acceleration sensors with digital signal output that can be directly embedded in navigation systems are gradually attracting more and more attention. muc...

AI Technical Summary

Problems solved by technology

At present, there are also a small number of resonant silicon micro-acceleration sensors. Although the output of this type of sensor is a digital signal, due to the use of silicon materials for processing, the vibration frequency is low, the sensitivity is poor, and the quality factor Q value is low.

Some accelerometers also adopt a differential structure. Due to the complexity of the structure, the processing technology is cumbersome and difficult to process.

In short, the existing accelerometers generally have problems such as analog output, low sensitivity, and complicated processing.

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