Method for extracting mesh graph from vector graph and performing filling through quick computing

Abstract

The invention relates to a method for extracting a mesh graph from a vector graph and performing filling through quick computing. The method comprises the following steps of reading input GDS vector graph information by a control module and analyzing a corresponding layer of a GDS file; performing conversion defined in the GDS vector graph file on a vector point, and forming absolute coordinates of the vector point of the GDS vector graph file; meshing the vector graph by the control module according to a view field size and a lens magnification rate of a collection module, and according to the absolute coordinates of the vector point, performing division and clipping on a polygon where the vector point is located according to coordinates of meshes; and obtaining polygon coordinates of meshes of a stripe once by the control module, and sending the polygon coordinates to a GPU for performing parallel filling. According to the method, a universal GPU computing card is adopted for realizing conversion from the vector graph to a bitmap; a plurality of GPU computing cards can be adopted for cooperative processing according to system demands; and triangular decomposition of the polygon does not need to be carried out in the processing process, so that the processing performance and production capacity of a system are improved.

Description

Technical field [0001] The invention relates to the technical field of semiconductor defect detection / lithography, in particular to a method for quickly calculating and extracting grid patterns from vector patterns and filling. Background technique [0002] In the process of semiconductor lithography / defect inspection, vector graphics (such as GDSII format) need to be converted into bitmaps. For lithography, the bitmaps are written on the mask using photolithography technology. The graphics are copied to the wafer, and the chip is formed after a variety of processes; for semiconductor defect detection, it is necessary to compare the image of the mask / wafer collected from the image sensor (such as a camera) with the bitmap to detect The difference between the captured image and the bitmap, these differences are the defects of the mask / die. [0003] The prior art generally uses FPGA to perform bitmap conversion, and generally first triangulates the polygons in the vector diagram, a...

AI Technical Summary

Problems solved by technology

[0004] 1. FPGA is a special-purpose hardware, which needs to be customized and developed for specific projects, and the cost is high;

[0005] 2. Triangular decomposition and filling of polygons, the performance is relatively low, resulting in low system productivity

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