Dry and wet machine and production line
An all-in-one, dry-wet technology, applied in semiconductor devices, final product manufacturing, sustainable manufacturing/processing, etc., can solve problems such as increasing process uncertainty factors and increasing costs
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[0062] figure 1 It is a schematic structural diagram of the wet and dry integrated machine provided in Embodiment 1 of the present invention; figure 2 Schematic diagram of the structure of the chip feeder provided by Embodiment 1 of the present invention; image 3 A top view of the structure of the automatic front cleaning machine provided in Embodiment 1 of the present invention; Figure 4 A side view of the structure of the automatic front cleaning machine provided by Embodiment 1 of the present invention; Figure 5 Schematic diagram of the structure of the automatic loading and unloading mechanism provided by Embodiment 1 of the present invention; Figure 6 A schematic structural view of the RIE dry texturing machine provided by Embodiment 1 of the present invention; Figure 7 Schematic diagram of the structure of the automatic stacking machine provided in Embodiment 1 of the present invention; Figure 8 A schematic structural diagram of the flower basket automatic tur...
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