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A uniform light rod fixing device

A technology of fixing device and light dodging rod, which is applied in the field of direct writing exposure machine, can solve the problems that the screw installation torque is not easy to control, affect the dodging effect, and the dodging effect is invalid, so as to achieve good installation effect and improve the uniformity of light , to ensure the effect of stability

Active Publication Date: 2019-09-03
无锡影速半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The installation method of the dodging rod in the prior art is mostly fixed by screw pressure blocks, and the contact surface between the fixing device and the dodging rod is relatively large. Total reflection cannot be formed on the contact surface, which not only affects the light uniformity effect, but also causes light energy loss; the fixture and the light uniform rod are in rigid contact. , the temperature will change to a large extent. In the case of thermal expansion and cold contraction, there will be a lot of stress between the fixing device and the dodging rod, which will easily cause damage to the dodging rod; the screw installation torque is not easy to control , it is easy to cause damage to the dodging rod, and the dodging effect will fail

Method used

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  • A uniform light rod fixing device
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Examples

Experimental program
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Effect test

Embodiment 1

[0039] Embodiment 1 Homogenizing rod fixing device

[0040] Such as figure 1 , figure 2 Shown is the description of the homogenizing rod fixing device of the invention.

[0041] The invention provides a homogenizing rod fixing device, such as figure 1 , figure 2 As shown, it includes a soft support 1 provided with a through hole 2. The through hole 2 is cylindrical as a whole, and the hole diameter is consistent from beginning to end, that is, the through hole is a contact support hole 3 as a whole. The shape is a cylinder, coaxial with the through hole 2. The cross-sectional diameter of the soft support 1 is 13mm, and the material of the soft support 1 is PTFE with a Shore hardness of 55-65. The length of the through hole 2 is equal to uniform The length of the light rod 8 has an aperture of 4.65 mm, the diameter of the circumscribed circle of the cross section of the fixed homogenizing rod 8 is 4.68 mm, the two ends of the through hole are provided with an orifice chamfer 5, an...

Embodiment 2

[0049] Embodiment 2 Homogenizing rod fixing device

[0050] The invention provides a homogenizing rod fixing device, such as Figure 1-Figure 3 As shown, it includes a soft support 1 provided with a through hole 2, a contact support hole 3 is provided at both ends of the through hole 2, a cylindrical non-contact hole 4 in the middle part of the through hole 2, a non-contact hole 4 Coaxial with the contact support hole 3; the shape of the soft support 1 is a cylinder, coaxial with the contact support hole 3. The cross-sectional diameter of the soft support 1 is 13mm, and the material of the soft support 1 is Shore hardness 55 -65 PTFE, the length of the through hole 2 is equal to the length of the homogenizing rod 8, the diameter of the contact support hole 3 is 4.65mm, the diameter of the circumscribed circle of the cross section of the fixed homogenizing rod 8 is 4.68mm, non-contact The hole 4 has a hole diameter of 5 mm, and one end of the contact support hole 3 is provided wi...

Embodiment 3

[0053] Embodiment 3 Homogenizing rod fixing device

[0054] The invention provides a homogenizing rod fixing device, such as figure 1 , figure 2 with Figure 4 As shown, it includes a soft support body 1 provided with a through hole 2. One end of the through hole 2 is provided with a contact support hole 3, the other end is a cylindrical non-contact hole 4, the non-contact hole 4 and the contact support hole 3 Coaxial: The shape of the soft support 1 is a cylinder, coaxial with the contact support hole 3. The cross-sectional diameter of the soft support 1 is 13mm, and the material of the soft support 1 is Poly Si with a Shore hardness of 55-65 Vinyl fluoride, the length of the through hole 2 is equal to the length of the homogenization rod 8, the contact support hole 3 has a diameter of 4.65mm, the fixed diameter of the homogenization rod 8 has a cross-sectional circumscribed circle diameter of 4.68mm, and the non-contact hole 4 has a diameter of 5mm , One end of the contact sup...

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PUM

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Abstract

The invention discloses a fixing device for a light-equalizing rod and belongs to the technical field of a direct writing exposure machine. The fixing device for the light-equalizing rod comprises a soft support with a through hole; the hardness of the soft support is shore hardness 50-80; the through hole in whole or local length along an axial direction is arranged as a cylindrical contact support hole; and the aperture of the contact support hole is less than the diameter of a circumscribed circle of the cross section of the fixed and mounted light-equalizing rod. The fixing device can solve the problems of low light transmission and poor optical uniformity caused by the easiness in leaking light in the fixing and mounting processes of the light-equalizing rod and the problem of easiness in damaging the light-equalizing rod in a rigid mounting process in the prior art.

Description

Technical field [0001] The invention relates to a homogenizing rod fixing device, which belongs to the technical field of direct writing exposure machines. Background technique [0002] The homogenizing rod is an optical glass device with a rectangular cross-section. Its function is to use the principle of total reflection of light. After multiple reflections in the light rod, each reflection will form a virtual light source image, and multiple reflections will form a two-dimensional virtual The light source matrix makes the light more uniform, so that the light passing through itself can achieve the uniform effect at the exit. [0003] The homogenization rod is a small, fragile glass device, and due to the limitation of its working principle, it is required to contact the air as much as possible on the side during work to obtain the maximum light transmission rate. Therefore, the installation of the homogenization rod There are specific requirements for the fixation, which not on...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 宁震坤程珂
Owner 无锡影速半导体科技有限公司
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