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Six-degree-of-freedom piezoelectric drive device and its excitation method

A piezoelectric drive, degree of freedom technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problems of difficulty in miniaturization, complex structure and high cost , to achieve the effect of significant practical significance, small size and light weight

Active Publication Date: 2018-09-11
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention aims to solve the problems of complex structure, high cost, difficulty in miniaturization and small stroke of the existing multi-degree-of-freedom piezoelectric drive device
A six-degree-of-freedom piezoelectric drive device and its excitation method are now provided

Method used

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  • Six-degree-of-freedom piezoelectric drive device and its excitation method
  • Six-degree-of-freedom piezoelectric drive device and its excitation method
  • Six-degree-of-freedom piezoelectric drive device and its excitation method

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specific Embodiment approach 1

[0061] Specific implementation mode one: refer to figure 1 Specifically explain this embodiment, the six-degree-of-freedom piezoelectric drive device described in this embodiment includes four sets of piezoelectric vibrators 1, a base 2 and a table 3,

[0062] The four groups of piezoelectric vibrators 1 have the same structure, and each group of piezoelectric vibrators 1 includes a horizontally curved piezoelectric ceramic group 1-1, a vertically curved piezoelectric ceramic group 1-2, and a front end cover 1-3,

[0063] The head end of the ceramic group composed of the horizontally curved piezoelectric ceramic group 1-1 and the vertically curved piezoelectric ceramic group 1-2 is connected to the four sides of the base body 2 through threads, and the horizontally curved piezoelectric ceramic group 1-1 and the vertical The end of the ceramic group composed of bending piezoelectric ceramic groups 1-2 is connected to a front end cover 1-3, and the end of the front end cover 1-3...

specific Embodiment approach 2

[0073] Specific implementation mode two: refer to Figure 2 to Figure 8 Describe this embodiment in detail. This embodiment is an excitation method for a six-degree-of-freedom piezoelectric drive device. This method is realized based on the six-degree-of-freedom piezoelectric drive device described in Embodiment 1. In this embodiment, the method can The six-degree-of-freedom piezoelectric driving device is driven to realize six-degree-of-freedom motion, wherein the six-degree-of-freedom includes movement along X, Y and Z axes, and rotation around X, Y and Z axes.

[0074] attached figure 2 A simplified schematic diagram of a six-degree-of-freedom piezoelectric drive device is given. In order to describe the motion trajectory of a six-degree-of-freedom piezoelectric drive device in one cycle, we simplify the piezoelectric vibrator 1 into a straight line. At the same time, we select four driving legs 1 -5 and the four contact points M, N, P, and Q of the workbench 3, use the m...

specific Embodiment approach 3

[0113] Specific implementation mode three: refer to Figure 9 Describe this embodiment in detail. This embodiment is an excitation method for a piezoelectric drive device with degrees of freedom. This method is realized based on the six-degree-of-freedom piezoelectric drive device described in the first specific embodiment. The excitation method for exciting the six-degree-of-freedom piezoelectric drive device to move along the X and Y axes, to excite it to move in any direction in the horizontal plane, and to move along the X and Y axes in the positive direction to realize the in-plane movement specifically includes the following steps:

[0114] Step 41. Apply a positive voltage to the vertically curved ceramic group 1-2 of the first group of piezoelectric vibrators 1-6 and the third group of piezoelectric vibrators 1-8, and they bend forward along the Z axis to drive the first group of piezoelectric vibrators The driving feet 1-5 of the vibrator 1-6 and the third group of pi...

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Abstract

A six-degrees-of-freedom piezoelectric actuator and an excitation method thereof relate to the field of piezoelectric actuation. The invention aims to solve the problem that the existing multi-degrees-of-freedom piezoelectric actuator has a complex structure and a small stroke, and is costly and difficult to miniaturize. The six-degrees-of-freedom piezoelectric actuator of the invention comprises four identical piezoelectric vibrators, a matrix, and a workbench. The structure of each piezoelectric vibrator comprises a horizontal bending piezoelectric ceramic group, a vertical bending piezoelectric ceramic group, and a front end cover, wherein the horizontal bending piezoelectric ceramic group is bent horizontally when a voltage excitation signal is applied, and the vertical bending piezoelectric ceramic group is bent vertically when a voltage excitation signal is applied. Voltage excitation signals are designed for the four piezoelectric vibrators to coordinate the sequence of horizontal and vertical bending motion of the four piezoelectric vibrators. A spatial polygonal motion track is formed at the driving foot. Further, six-degrees-of-freedom actuation is realized using friction as a driving force. The scheme is used to realize six-degrees-of-freedom actuation of a piezoelectric actuator.

Description

technical field [0001] The invention relates to a six-degree-of-freedom piezoelectric drive device and an excitation method thereof. The utility model belongs to the field of piezoelectric drive technology. Background technique [0002] In recent years, piezoelectric actuators have been regarded as an effective and practical precision actuator. They have the advantages of simple structure, small size, high power density, high precision, and fast response, which enable them to work in narrow working spaces and precise demanding areas. The multi-degree-of-freedom piezoelectric drive device has multi-directional drive capability, and can realize multiple functions during work, and has the advantages of small size and multiple functions. Based on these characteristics, multi-degree-of-freedom piezoelectric actuators have broad application prospects in high-precision fields such as biomedicine, MEMS processing, robotics, and aerospace. [0003] Most of the existing multi-degre...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/06H02N2/04
CPCH02N2/046H02N2/062
Inventor 刘英想邓杰石胜君陈维山冯培连
Owner HARBIN INST OF TECH
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