An evaporation mask, its manufacturing method, electromagnetic evaporation device and evaporation method
A manufacturing method and mask technology, which is applied in the field of masks, can solve the problem of increasing the gap between the substrate and the evaporation mask, and achieve the effect of avoiding diffraction and reducing the gap
Active Publication Date: 2022-04-26
BOE TECH GRP CO LTD
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Problems solved by technology
[0003] To sum up, in the current existing electromagnetic evaporation device, due to the effect of gravity, the middle position of the evaporation mask sags more, and the gap between the substrate and the evaporation mask becomes larger. Plating material is prone to diffraction at gaps
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[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0041] Wherein, the thickness of the film layer and the shape of the area in the drawings do not reflect the real scale, and the purpose is only to illustrate the content of the present invention.
[0042] An evaporation mask provided by an embodiment of the present invention is mainly an evaporation mask used in an electromagnetic evaporation device. The first groove filled with a magnetic material, because the magnetism of the magnetic material is stronger t...
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The invention relates to an evaporation mask, a manufacturing method thereof, an electromagnetic evaporation device and an evaporation method, which are used to solve the problem that the middle position of the evaporation mask is relatively drooping due to the effect of gravity in the existing electromagnetic evaporation device. Many, the vapor deposition material is prone to diffraction at the gap. The evaporation mask comprises: a mask body, a plurality of openings arranged on the mask body; each opening is used as an evaporation area, and other mask bodies except the openings are used as shielding areas; The region is provided with a first groove; the first groove is filled with a magnetic material, and the magnetism of the magnetic material is stronger than that of the main material of the mask plate. The first groove is set on the main body of the evaporation mask, and the first groove is filled with a magnetic material with strong magnetism, so that the adsorption force of the electromagnetic device in the electromagnetic evaporation device to the evaporation mask can be increased , can reduce the gap between the evaporation mask and the substrate to be evaporated, and avoid the diffraction of the evaporated material at the gap.
Description
technical field [0001] The invention relates to the technical field of masks, in particular to an evaporation mask, a manufacturing method thereof, an electromagnetic evaporation device and an evaporation method. Background technique [0002] At present, a relatively mature process is to use an evaporation method to manufacture OLED (Organic Light-Emitting Diode, organic light-emitting diode) display products. In the electromagnetic evaporation process, the evaporation mask is a very important equipment component. As there are more and more large-size OLED display products, as the size of the substrate increases, the size of the evaporation mask will also increase, and the thickness of the main body of the evaporation mask will also increase accordingly. Due to the effect of gravity, There is a lot of sagging in the middle of the evaporation mask, and the gap between the substrate and the evaporation mask becomes larger. During the evaporation process, the evaporation mater...
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IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 赵德江
Owner BOE TECH GRP CO LTD