Precise measuring system and measuring method of displacement and rotation angle of micro-nano control platform

A technology of micro-nano control and precise measurement, applied in measurement devices, instruments, optical devices, etc., can solve the problems of inability to measure angle and translation at the same time, and inability to measure, to meet real-time measurement feedback, simple structure, and overcome limitations Effect

Inactive Publication Date: 2017-07-07
BEIHANG UNIV
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Problems solved by technology

Existing laser interferometers often can only measure a single translational movement or an angle alone, and cannot measure both angles and translations at the same time. It is generated by the ro

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  • Precise measuring system and measuring method of displacement and rotation angle of micro-nano control platform
  • Precise measuring system and measuring method of displacement and rotation angle of micro-nano control platform
  • Precise measuring system and measuring method of displacement and rotation angle of micro-nano control platform

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Example Embodiment

[0037] The specific embodiments of the present invention will be described in further detail below in conjunction with the drawings and embodiments. The following examples are used to illustrate the present invention, but not to limit the scope of the present invention.

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", The orientation or positional relationship indicated by "radial", "circumferential", "X-axis", "Y-axis", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, not It indicates or implies that the pointed device or element must have a specific orientation, be constructe...

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Abstract

The invention, which relates to the field of the laser detection technology for a micro-nano control platform, discloses a precise measuring system of displacement and rotation angle of a micro-nano control platform. The micro-nano control platform consists of a platform pedestal and a displacement platform. The measuring system comprises a first laser interferometer, a second laser interferometer, a third laser interferometer, and an optical assembly; and the first laser interferometer and the second laser interferometer are arranged at a first axis, the third laser interferometer is arranged at a second axis perpendicular to the first axis, and the optical assembly arranged at the displacement platform forms a crossed shape. The optical assembly includes a first right-angle lens part enabling incident light emitted by the first laser interferometer to be parallel to emergent light, a second right-angle lens part enabling incident light emitted by the second laser interferometer to be parallel to emergent light, and a third right-angle lens part enabling incident light emitted by the third laser interferometer to be parallel to emergent light. With the measuring system and the measuring method, spatial multi-degree-of-freedom measuring can be realized with high measuring precision.

Description

technical field [0001] The invention relates to the technical field of laser detection of a micro-nano control platform, in particular to a precision measurement system and a measurement method for the displacement and rotation angle of a micro-nano control platform. Background technique [0002] With the development and application of micro-nano control technology, the micro-nano control platform with multiple degrees of freedom, especially the rotation degree of freedom, has attracted more and more attention, and the precise measurement of angular displacement and linear displacement is an important factor affecting its development. [0003] Laser interferometers are widely used in various precision measurement systems due to their advantages such as high resolution, non-contact, little influence from the environment, and sensitive response. The laser interferometer performs displacement measurement based on the interference between the reference beam and the measuring bea...

Claims

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Application Information

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IPC IPC(8): G01B11/02G01B11/26
CPCG01B11/02G01B11/26
Inventor 张蓓刘雨高枫赵子琪闫鹏
Owner BEIHANG UNIV
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