Precise measuring system and measuring method of displacement and rotation angle of micro-nano control platform

Abstract

The invention, which relates to the field of the laser detection technology for a micro-nano control platform, discloses a precise measuring system of displacement and rotation angle of a micro-nano control platform. The micro-nano control platform consists of a platform pedestal and a displacement platform. The measuring system comprises a first laser interferometer, a second laser interferometer, a third laser interferometer, and an optical assembly; and the first laser interferometer and the second laser interferometer are arranged at a first axis, the third laser interferometer is arranged at a second axis perpendicular to the first axis, and the optical assembly arranged at the displacement platform forms a crossed shape. The optical assembly includes a first right-angle lens part enabling incident light emitted by the first laser interferometer to be parallel to emergent light, a second right-angle lens part enabling incident light emitted by the second laser interferometer to be parallel to emergent light, and a third right-angle lens part enabling incident light emitted by the third laser interferometer to be parallel to emergent light. With the measuring system and the measuring method, spatial multi-degree-of-freedom measuring can be realized with high measuring precision.

Description

technical field [0001] The invention relates to the technical field of laser detection of a micro-nano control platform, in particular to a precision measurement system and a measurement method for the displacement and rotation angle of a micro-nano control platform. Background technique [0002] With the development and application of micro-nano control technology, the micro-nano control platform with multiple degrees of freedom, especially the rotation degree of freedom, has attracted more and more attention, and the precise measurement of angular displacement and linear displacement is an important factor affecting its development. [0003] Laser interferometers are widely used in various precision measurement systems due to their advantages such as high resolution, non-contact, little influence from the environment, and sensitive response. The laser interferometer performs displacement measurement based on the interference between the reference beam and the measuring bea...

AI Technical Summary

Problems solved by technology

Existing laser interferometers often can only measure a single translational movement or an angle alone, and cannot measure both angles and translations at the same time. It is generated by the rotation of the nano-manipulation platform, so the precision measurement system for the displacement and rotation angle of the micro-nano manipulation platform cannot measure its angular displacement

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